Jun Hashimoto

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Albany, NY, US

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Patents Grantslast 30 patents

Information Patent Grant
Plasma etching apparatus, plasma etching method, and semiconductor...
- Patent number 8,969,210
- Issue date Mar 3, 2015
- Tokyo Electron Limited
- Toshihisa Nozawa
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
PLASMA ETCHING APPARATUS, PLASMA ETCHING METHOD, AND SEMICONDUCTOR...
- Publication number 20120064726
- Publication date Mar 15, 2012
- TOKYO ELECTRON LIMITED
- Toshihisa Nozawa
- H01 - BASIC ELECTRIC ELEMENTS