Jun Hee Han

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Fremont, CA, US

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Patents Grantslast 30 patents

Information Patent Grant
System, method and apparatus for ion milling in a plasma etch chamber
- Patent number 9,899,227
- Issue date Feb 20, 2018
- Lam Research Corporation
- Joydeep Guha
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
FLAT BOTTOM SHADOW RING
- Publication number 20230223292
- Publication date Jul 13, 2023
- LAM RESEARCH CORPORATION
- Lai Wei
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MULTI-LOCATION GAS INJECTION TO IMPROVE UNIFORMITY IN RAPID ALTERNA...
- Publication number 20220108875
- Publication date Apr 7, 2022
- LAM RESEARCH CORPORATION
- William THIE
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SYSTEM, METHOD AND APPARATUS FOR ION MILLING IN A PLASMA ETCH CHAMBER
- Publication number 20140235056
- Publication date Aug 21, 2014
- LAM RESEARCH CORPORATION
- Joydeep Guha
- H01 - BASIC ELECTRIC ELEMENTS