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Jun Ho Son
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Gyeongbuk, KR
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Patents Grants
last 30 patents
Information
Patent Grant
Substrate cleaning apparatus and method and brush assembly used the...
Patent number
9,704,729
Issue date
Jul 11, 2017
K.C. Tech Co., Ltd.
Moon Gi Cho
B08 - CLEANING
Information
Patent Grant
Membrane assembly and carrier head having the membrane assembly
Patent number
8,939,817
Issue date
Jan 27, 2015
K.C. Tech Co., Ltd.
Jun Ho Son
B24 - GRINDING POLISHING
Information
Patent Grant
Cleaning device for chemical mechanical polishing equipment
Patent number
7,674,156
Issue date
Mar 9, 2010
K.C. Tech Co., Ltd
Jun Ho Son
B24 - GRINDING POLISHING
Patents Applications
last 30 patents
Information
Patent Application
SUBSTRATE CLEANING APPARATUS AND METHOD AND BRUSH ASSEMBLY USED THE...
Publication number
20140366913
Publication date
Dec 18, 2014
K.C. TECH CO., LTD.
Moon Gi CHO
A46 - BRUSHWARE
Information
Patent Application
MEMBRANE ASSEMBLY AND CARRIER HEAD HAVING THE MEMBRANE ASSEMBLY
Publication number
20120309275
Publication date
Dec 6, 2012
K. C. TECH CO., LTD.
Jun Ho Son
B24 - GRINDING POLISHING
Information
Patent Application
CLEANING DEVICE FOR CHEMICAL MECHANICAL POLISHING EQUIPMENT
Publication number
20090093199
Publication date
Apr 9, 2009
DOOSAN MECATEC CO., LTD
Jun Ho SON
B24 - GRINDING POLISHING