Membership
Tour
Register
Log in
Jun-ichi Kai
Follow
Person
Tokyo, JP
People
Overview
Industries
Organizations
People
Information
Impact
Patents Grants
last 30 patents
Information
Patent Grant
Electron beam exposure system
Patent number
4,853,870
Issue date
Aug 1, 1989
Fujitsu Limited
Nobuyuki Yasutake
B82 - NANO-TECHNOLOGY