JUN KITAGAWA

Follow

Person

Tochigi, JP

People

Patents Applicationslast 30 patents

Information Patent Application
INFORMATION PROCESSING APPARATUS, EXPOSURE APPARATUS, AND ARTICLE M...
- Publication number 20240393700
- Publication date Nov 28, 2024
- Canon Kabushiki Kaisha
- JUN KITAGAWA
- G05 - CONTROLLING REGULATING
Information Patent Application
SUBSTRATE PROCESSING SYSTEM AND ITS CONTROL METHOD
- Publication number 20240055283
- Publication date Feb 15, 2024
- Canon Kabushiki Kaisha
- TAICHI YOSHIOKA
- H01 - BASIC ELECTRIC ELEMENTS