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Jun Li
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Montreal, CA
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last 30 patents
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Patent Grant
Anhydrous HF release of process for MEMS devices
Patent number
7,365,016
Issue date
Apr 29, 2008
DALSA Semiconductor Inc.
Luc Ouellet
B81 - MICRO-STRUCTURAL TECHNOLOGY
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last 30 patents
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Patent Application
Anhydrous HF release of process for MEMS devices
Publication number
20060211163
Publication date
Sep 21, 2006
DALSA Semiconductor Inc.
Luc Ouellet
B81 - MICRO-STRUCTURAL TECHNOLOGY