Jun MATSUSHITA

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Yokohama-shi, JP

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Patents Grantslast 30 patents

Information Patent Grant
Substrate processing device and substrate processing method
- Patent number 10,406,566
- Issue date Sep 10, 2019
- SHIBAURA MECHATRONICS CORPORATION
- Jun Matsushita
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing apparatus and substrate processing method
- Patent number 9,964,358
- Issue date May 8, 2018
- Shibaura Mechatronics Corporation
- Jun Matsushita
- F26 - DRYING

Patents Applicationslast 30 patents

Information Patent Application
SUBSTRATE PROCESSING DEVICE AND SUBSTRATE PROCESSING METHOD
- Publication number 20170259308
- Publication date Sep 14, 2017
- SHIBAURA MECHATRONICS CORPORATION
- Jun MATSUSHITA
- B08 - CLEANING
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
- Publication number 20160322241
- Publication date Nov 3, 2016
- SHIBAURA MECHATRONICS CORPORATION
- Jun MATSUSHITA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING DEVICE AND SUBSTRATE PROCESSING METHOD
- Publication number 20150090297
- Publication date Apr 2, 2015
- SHIBAURA MECHATRONICS CORPORATION
- Jun MATSUSHITA
- B08 - CLEANING
Information Patent Application
SUBSTRATE PROCESSING DEVICE AND SUBSTRATE PROCESSING METHOD
- Publication number 20150090298
- Publication date Apr 2, 2015
- Shibaura Mechantronics Corporation
- Yuji NAGASHIMA
- B08 - CLEANING
Information Patent Application
SUBSTRATE PROCESSING DEVICE AND SUBSTRATE PROCESSING METHOD
- Publication number 20150090296
- Publication date Apr 2, 2015
- SHIBAURA MECHATRONICS CORPORATION
- Yuji NAGASHIMA
- B08 - CLEANING