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Jun NAKAGOMI
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Nirasaki City, Yamanashi, JP
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Patents Grants
last 30 patents
Information
Patent Grant
Plasma processing apparatus
Patent number
11,508,556
Issue date
Nov 22, 2022
Tokyo Electron Limited
Taro Ikeda
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Electric field sensor, surface wave plasma source, and surface wave...
Patent number
11,244,810
Issue date
Feb 8, 2022
Tokyo Electron Limited
Kiyoshi Mori
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Plasma processing apparatus and gas introduction mechanism
Patent number
10,804,078
Issue date
Oct 13, 2020
Tokyo Electron Limited
Yutaka Fujino
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Plasma processing device with shower plate having protrusion for su...
Patent number
10,557,200
Issue date
Feb 11, 2020
Tokyo Electron Limited
Taro Ikeda
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Plasma processing apparatus
Patent number
9,991,097
Issue date
Jun 5, 2018
Tokyo Electron Limited
Tomohito Komatsu
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
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Patent Application
PLASMA PROCESSING APPARATUS
Publication number
20220384146
Publication date
Dec 1, 2022
TOKYO ELECTRON LIMITED
Syouji YAMAGISHI
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
ELECTRIC FIELD SENSOR, SURFACE WAVE PLASMA SOURCE, AND SURFACE WAVE...
Publication number
20200365371
Publication date
Nov 19, 2020
TOKYO ELECTRON LIMITED
Kiyoshi MORI
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
PLASMA PROCESSING APPARATUS
Publication number
20190075644
Publication date
Mar 7, 2019
TOKYO ELECTRON LIMITED
Taro IKEDA
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
PLASMA PROCESSING APPARATUS
Publication number
20180337023
Publication date
Nov 22, 2018
TOKYO ELECTRON LIMITED
Taro IKEDA
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
PLASMA PROCESSING APPARATUS
Publication number
20180114677
Publication date
Apr 26, 2018
TOKYO ELECTRON LIMITED
Tomohito KOMATSU
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
PLASMA PROCESSING APPARATUS AND GAS INTRODUCTION MECHANISM
Publication number
20170309452
Publication date
Oct 26, 2017
Yutaka FUJINO
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
PLASMA PROCESSING DEVICE
Publication number
20160222516
Publication date
Aug 4, 2016
TOKYO ELECTRON LIMITED
Taro IKEDA
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...