Jun Nogami

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Kumamoto, JP

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Patents Grantslast 30 patents

Information Patent Grant
Substrate processing apparatus and substrate processing method
- Patent number 9,378,940
- Issue date Jun 28, 2016
- Tokyo Electron Limited
- Hisashi Kawano
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
- Publication number 20140251539
- Publication date Sep 11, 2014
- TOKYO ELECTRON LIMITED
- Tsuyoshi Mizuno
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
- Publication number 20130340796
- Publication date Dec 26, 2013
- Hisashi Kawano
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
- Publication number 20130284213
- Publication date Oct 31, 2013
- TOKYO ELECTRON LIMITED
- Yosuke Hachiya
- H01 - BASIC ELECTRIC ELEMENTS