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Jun Ohkura
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Kumamoto, JP
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last 30 patents
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Patent Grant
Substrate processing apparatus and substrate processing method
Patent number
RE37470
Issue date
Dec 18, 2001
Tokyo Electron Limited
Jun Ohkura
396 - Photography
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Patent Grant
Substrate processing apparatus and substrate processing method
Patent number
5,664,254
Issue date
Sep 2, 1997
Tokyo Electron Limited
Jun Ohkura
H01 - BASIC ELECTRIC ELEMENTS