Membership
Tour
Register
Log in
Jun Ookura
Follow
Person
Kumamoto-Ken, JP
People
Overview
Industries
Organizations
People
Information
Impact
Patents Grants
last 30 patents
Information
Patent Grant
Temperature control for performing heat process in coating/developi...
Patent number
7,868,270
Issue date
Jan 11, 2011
Tokyo Electron Limited
Jun Ookura
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Temperature control for performing heat process on resist film
Patent number
7,755,003
Issue date
Jul 13, 2010
Tokyo Electron Limited
Jun Ookura
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Coating film forming method and apparatus
Patent number
7,510,611
Issue date
Mar 31, 2009
Tokyo Electron Limited
Tomohide Minami
B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information
Patent Grant
Coating film forming method and system
Patent number
7,488,505
Issue date
Feb 10, 2009
Tokyo Electron Limited
Tomohide Minami
B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information
Patent Grant
Substrate processing apparatus and method for adjusting a substrate...
Patent number
6,973,370
Issue date
Dec 6, 2005
Tokyo Electron Limited
Kazuhiko Ito
B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information
Patent Grant
Coating film forming method and apparatus
Patent number
6,884,294
Issue date
Apr 26, 2005
Tokyo Electron Limited
Tomohide Minami
B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information
Patent Grant
Coating film forming method and system
Patent number
6,776,845
Issue date
Aug 17, 2004
Tokyo Electron Limited
Tomohide Minami
B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information
Patent Grant
Heat treatment unit, cooling unit and cooling treatment method
Patent number
6,686,571
Issue date
Feb 3, 2004
Tokyo Electron Limited
Jun Ookura
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Processing apparatus, processing system, distinguishing method, and...
Patent number
6,654,668
Issue date
Nov 25, 2003
Tokyo Electron Limited
Koji Harada
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Substrate processing apparatus and substrate processing method
Patent number
6,644,965
Issue date
Nov 11, 2003
Tokyo Electron Limited
Jun Ookura
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Liquid coating apparatus with temperature controlling manifold
Patent number
6,620,245
Issue date
Sep 16, 2003
Tokyo Electron Limited
Seiki Ishida
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Substrate processing system and substrate processing method
Patent number
6,507,770
Issue date
Jan 14, 2003
Tokyo Electron Limited
Masanori Tateyama
Y02 - TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMA...
Information
Patent Grant
Heat treatment unit, cooling unit and cooling treatment method
Patent number
6,461,438
Issue date
Oct 8, 2002
Tokyo Electron Limited
Jun Ookura
G05 - CONTROLLING REGULATING
Information
Patent Grant
Substrate processing apparatus and substrate processing method
Patent number
6,402,509
Issue date
Jun 11, 2002
Tokyo Electron, Limited
Jun Ookura
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Transfer device centering method and substrate processing apparatus
Patent number
6,332,751
Issue date
Dec 25, 2001
Tokyo Electron Limited
Seiji Kozawa
B65 - CONVEYING PACKING STORING HANDLING THIN OR FILAMENTARY MATERIAL
Patents Applications
last 30 patents
Information
Patent Application
Heat Treatment Method, Recording Medium Having Recorded Program for...
Publication number
20120031892
Publication date
Feb 9, 2012
TOKYO ELECTRON LIMITED
Kenichi Shigetomi
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Application
TEMPERATURE CONTROL FOR PERFORMING HEAT PROCESS IN COATING/DEVELOPI...
Publication number
20080283515
Publication date
Nov 20, 2008
TOKYO ELECTRON LIMITED
Jun Ookura
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
TEMPERATURE CONTROL FOR PERFORMING HEAT PROCESS ON RESIST FILM
Publication number
20080156785
Publication date
Jul 3, 2008
TOKYO ELECTRON LIMITED
Jun Ookura
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Coating film forming method and apparatus
Publication number
20050170087
Publication date
Aug 4, 2005
TOKYO ELECTRON LIMITED
Tomohide Minami
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Substrate processing apparatus and method for adjusting a substrate...
Publication number
20050016818
Publication date
Jan 27, 2005
TOKYO ELECTRON LIMITED
Kazuhiko Ito
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Coating apparatus and coating method
Publication number
20040261701
Publication date
Dec 30, 2004
Shinji Kobayashi
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Coating film forming method and system
Publication number
20040241320
Publication date
Dec 2, 2004
TOKYO ELECTRON LIMITED
Tomohide Minami
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Heat treatment unit, cooling unit and cooling treatment method
Publication number
20030005707
Publication date
Jan 9, 2003
TOKYO ELECTRON LIMITED
Jun Ookura
G05 - CONTROLLING REGULATING
Information
Patent Application
Coating film forming method and system
Publication number
20020176928
Publication date
Nov 28, 2002
TOKYO ELECTRON LIMITED
Tomohide Minami
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Coating film forming method and apparatus
Publication number
20020150679
Publication date
Oct 17, 2002
TOKYO ELECTRON LIMITED
Tomohide Minami
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Substrate processing apparatus and substrate processing method
Publication number
20020072025
Publication date
Jun 13, 2002
Jun Ookura
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Substrate processing apparatus
Publication number
20020011208
Publication date
Jan 31, 2002
Seiki Ishida
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Substrate processing system and substrate processing method
Publication number
20010051837
Publication date
Dec 13, 2001
Masanori Tateyama
G05 - CONTROLLING REGULATING