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Jun Ota
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Utsunomiya-shi, JP
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Patents Grants
last 30 patents
Information
Patent Grant
Imprint apparatus and method of manufacturing article
Patent number
10,248,018
Issue date
Apr 2, 2019
Canon Kabushiki Kaisha
Philip D. Schumaker
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Piezoelectric-actuator driving device and exposure apparatus includ...
Patent number
7,851,969
Issue date
Dec 14, 2010
Canon Kabushiki Kaisha
Jun Ota
H02 - GENERATION CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
Information
Patent Grant
Optical element holding apparatus and exposure apparatus
Patent number
7,573,658
Issue date
Aug 11, 2009
Canon Kabushiki Kaisha
Ichiro Onuki
G02 - OPTICS
Information
Patent Grant
Optical element holding apparatus and exposure apparatus
Patent number
7,573,659
Issue date
Aug 11, 2009
Canon Kabushiki Kaisha
Ichiro Onuki
G02 - OPTICS
Patents Applications
last 30 patents
Information
Patent Application
IMPRINT APPARATUS AND METHOD OF MANUFACTURING ARTICLE
Publication number
20160288403
Publication date
Oct 6, 2016
Canon Kabushiki Kaisha
Philip D. Schumaker
B29 - WORKING OF PLASTICS WORKING OF SUBSTANCES IN A PLASTIC STATE, IN GENERAL
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Patent Application
PIEZOELECTRIC-ACTUATOR DRIVING DEVICE AND EXPOSURE APPARATUS INCLUD...
Publication number
20090092929
Publication date
Apr 9, 2009
Canon Kabushiki Kaisha
Jun Ota
G02 - OPTICS
Information
Patent Application
OPTICAL ELEMENT HOLDING APPARATUS AND EXPOSURE APPARATUS
Publication number
20080123203
Publication date
May 29, 2008
Canon Kabushiki Kaisha
Ichiro Onuki
G02 - OPTICS
Information
Patent Application
OPTICAL ELEMENT HOLDING APPARATUS AND EXPOSURE APPARATUS
Publication number
20080117534
Publication date
May 22, 2008
Canon Kabushiki Kaisha
Ichiro Onuki
G02 - OPTICS