Jun Satoh

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Yamanashi, JP

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Patents Grantslast 30 patents

Information Patent Grant
Film formation method and apparatus for semiconductor process
- Patent number 8,080,290
- Issue date Dec 20, 2011
- Tokyo Electron Limited
- Kazuhide Hasebe
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
Film formation method and apparatus for semiconductor process
- Publication number 20090191722
- Publication date Jul 30, 2009
- TOKYO ELECTRON LIMITED
- Kazuhide Hasebe
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...