Jun Takamatsu

Person

Kanagawa-Ken, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Optical system adjusting method for energy beam apparatus
- Patent number 6,836,319
- Issue date Dec 28, 2004
- Kabushiki Kaisha Toshiba
- Munehiro Ogasawara
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Optical system adjusting method for energy beam apparatus
- Patent number 6,781,680
- Issue date Aug 24, 2004
- Kabushiki Kaisha Toshiba
- Munehiro Ogasawara
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Charged particle beam system and chamber of charged particle beam s...
- Patent number 6,617,592
- Issue date Sep 9, 2003
- Kabushiki Kaisha Toshiba
- Jun Takamatsu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Optical system adjusting method for energy beam apparatus
- Patent number 6,606,149
- Issue date Aug 12, 2003
- Kabushiki Kaisha Toshiba
- Munehiro Ogasawara
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Charged particle beam apparatus and gas supply and exhaustion metho...
- Patent number 6,207,117
- Issue date Mar 27, 2001
- Kabushiki Kaisha Toshiba
- Jun Takamatsu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Charged particle beam irradiation apparatus
- Patent number 6,172,364
- Issue date Jan 9, 2001
- Kabushiki Kaisha Toshiba
- Munehiro Ogasawara
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Charged beam applying apparatus
- Patent number 5,949,076
- Issue date Sep 7, 1999
- Kabushiki Kaisha Toshiba
- Kenji Ohtoshi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Charged beam apparatus having cleaning function and method of clean...
- Patent number 5,539,211
- Issue date Jul 23, 1996
- Kabushiki Kaisha Toshiba
- Kenji Ohtoshi
- B08 - CLEANING

Patents Applicationslast 30 patents

Information Patent Application
Optical system adjusting method for energy beam apparatus
- Publication number 20040190006
- Publication date Sep 30, 2004
- KABUSHIKI KAISHA TOSHIBA
- Munehiro Ogasawara
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Charged particle beam system and chamber of charged particle beam s...
- Publication number 20010025931
- Publication date Oct 4, 2001
- Jun Takamatsu
- H01 - BASIC ELECTRIC ELEMENTS

Jun Takamatsu

Person

Patents Grantslast 30 patents

Optical system adjusting method for energy beam apparatus

Optical system adjusting method for energy beam apparatus

Charged particle beam system and chamber of charged particle beam s...

Optical system adjusting method for energy beam apparatus

Charged particle beam apparatus and gas supply and exhaustion metho...

Charged particle beam irradiation apparatus

Charged beam applying apparatus

Charged beam apparatus having cleaning function and method of clean...

Patents Applicationslast 30 patents

Optical system adjusting method for energy beam apparatus

Charged particle beam system and chamber of charged particle beam s...