Jun Takano

Follow

Person

Sagamihara, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Silica glass member for UV-lithography, method for silica glass pro...
- Patent number 5,702,495
- Issue date Dec 30, 1997
- Nikon Corporation
- Hiroyuki Hiraiwa
- G02 - OPTICS
Information Patent Grant
Silica glass member for UV-lithography, method for silica glass pro...
- Patent number 5,699,183
- Issue date Dec 16, 1997
- Nikon Corporation
- Hiroyuki Hiraiwa
- G02 - OPTICS