Jun Tamura

Person

Nirasaki-shi, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Substrate processing apparatus
- Patent number 9,524,847
- Issue date Dec 20, 2016
- Tokyo Electron Limited
- Nobuhiro Wada
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing apparatus
- Patent number 9,455,125
- Issue date Sep 27, 2016
- Tokyo Electron Limited
- Akihiro Yoshimura
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing method and substrate processing apparatus
- Patent number 8,592,319
- Issue date Nov 26, 2013
- Tokyo Electron Limited
- Nobuhiro Wada
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing apparatus, method for measuring distance betwe...
- Patent number 8,383,000
- Issue date Feb 26, 2013
- Tokyo Electron Limited
- Hiroshi Tsujimoto
- G01 - MEASURING TESTING
Information Patent Grant
Processing condition inspection and optimization method of damage r...
- Patent number 8,282,984
- Issue date Oct 9, 2012
- Tokyo Electron Limited
- Reiko Sasahara
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Semiconductor device manufacturing method and storage medium
- Patent number 8,026,150
- Issue date Sep 27, 2011
- Tokyo Electron Limited
- Reiko Sasahara
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
MODEL-BASED CONTROL METHOD, MODEL-BASED CONTROL SYSTEM, AND STORAGE...
- Publication number 20230239966
- Publication date Jul 27, 2023
- TOKYO ELECTRON LIMITED
- Jun TAMURA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS
- Publication number 20150144266
- Publication date May 28, 2015
- TOKYO ELECTRON LIMITED
- Nobuhiro WADA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS
- Publication number 20140048210
- Publication date Feb 20, 2014
- TOKYO ELECTRON LIMITED
- Nobuhiro WADA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PROCESSING CONDITION INSPECTION AND OPTIMIZATION METHOD OF DAMAGE R...
- Publication number 20130025537
- Publication date Jan 31, 2013
- Reiko SASAHARA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS
- Publication number 20110318934
- Publication date Dec 29, 2011
- TOKYO ELECTRON LIMITED
- Nobuhiro WADA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS
- Publication number 20110303643
- Publication date Dec 15, 2011
- TOKYO ELECTRON LIMITED
- Nobuhiro WADA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS
- Publication number 20110240224
- Publication date Oct 6, 2011
- TOKYO ELECTRON LIMITED
- Akihiro YOSHIMURA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS, METHOD FOR MEASURING DISTANCE BETWE...
- Publication number 20110132873
- Publication date Jun 9, 2011
- TOKYO ELECTRON LIMITED
- Hiroshi Tsujimoto
- G01 - MEASURING TESTING
Information Patent Application
SEMICONDUCTOR DEVICE MANUFACTURING METHOD AND STORAGE MEDIUM
- Publication number 20090305480
- Publication date Dec 10, 2009
- TOKYO ELECTRON LIMITED
- Reiko SASAHARA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PROCESSING CONDITION INSPECTION AND OPTIMIZATION METHOD OF DAMAGE R...
- Publication number 20090146145
- Publication date Jun 11, 2009
- TOKYO ELECTRON LIMITED
- Reiko SASAHARA
- H01 - BASIC ELECTRIC ELEMENTS

Person

Patents Grantslast 30 patents

Substrate processing apparatus

Substrate processing apparatus

Substrate processing method and substrate processing apparatus

Substrate processing apparatus, method for measuring distance betwe...

Processing condition inspection and optimization method of damage r...

Semiconductor device manufacturing method and storage medium

Patents Applicationslast 30 patents

MODEL-BASED CONTROL METHOD, MODEL-BASED CONTROL SYSTEM, AND STORAGE...

SUBSTRATE PROCESSING APPARATUS

SUBSTRATE PROCESSING APPARATUS

PROCESSING CONDITION INSPECTION AND OPTIMIZATION METHOD OF DAMAGE R...

SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS

SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS

SUBSTRATE PROCESSING APPARATUS

SUBSTRATE PROCESSING APPARATUS, METHOD FOR MEASURING DISTANCE BETWE...

SEMICONDUCTOR DEVICE MANUFACTURING METHOD AND STORAGE MEDIUM

PROCESSING CONDITION INSPECTION AND OPTIMIZATION METHOD OF DAMAGE R...