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Jun Tamura
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Sanda, JP
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last 30 patents
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Patent Grant
Sputtering target and method for manufacturing same
Patent number
5,435,965
Issue date
Jul 25, 1995
Mitsubishi Materials Corporation
Munenori Mashima
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Target units
Patent number
5,338,425
Issue date
Aug 16, 1994
Mitsubishi Materials Corporation
Akifumi Mishima
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Platinum-cobalt alloy sputtering target and method for manufacturin...
Patent number
5,282,946
Issue date
Feb 1, 1994
Mitsubishi Materials Corporation
Makoto Kinoshita
C22 - METALLURGY FERROUS OR NON-FERROUS ALLOYS TREATMENT OF ALLOYS OR NON-FER...