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Jun Wan KIM
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San Jose, CA, US
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Patents Grants
last 30 patents
Information
Patent Grant
Mask passivation using plasma
Patent number
9,418,867
Issue date
Aug 16, 2016
Applied Materials, Inc.
Byungkook Kong
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method of etching a boron doped carbon hardmask
Patent number
9,287,124
Issue date
Mar 15, 2016
Applied Materials, Inc.
Byungkook Kong
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
Information
Patent Application
MASK PASSIVATION USING PLASMA
Publication number
20150200109
Publication date
Jul 16, 2015
Applied Materials, Inc.
Byungkook Kong
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
POST ETCH TREATMENT TECHNOLOGY FOR ENHANCING PLASMA-ETCHED SILICON...
Publication number
20150064880
Publication date
Mar 5, 2015
Applied Materials, Inc.
Jun Wan KIM
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD OF ETCHING A BORON DOPED CARBON HARDMASK
Publication number
20150064914
Publication date
Mar 5, 2015
Applied Materials, Inc.
Byungkook KONG
H01 - BASIC ELECTRIC ELEMENTS