Jun Yada

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Kumamoto, JP

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Patents Grantslast 30 patents

Information Patent Grant
Coating apparatus and liquid surface detecting method
- Patent number 9,649,655
- Issue date May 16, 2017
- Tokyo Electron Limited
- Jun Yada
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...

Patents Applicationslast 30 patents

Information Patent Application
COATING APPARATUS AND LIQUID SURFACE DETECTING METHOD
- Publication number 20140347464
- Publication date Nov 27, 2014
- TOKYO ELECTRON LIMITED
- Jun Yada
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...