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Jun Yamashima
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Kurokawa-gun, Miyagi, JP
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last 30 patents
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Patent Grant
Gas supply system, plasma processing apparatus, and operation metho...
Patent number
10,472,717
Issue date
Nov 12, 2019
Tokyo Electron Limited
Atsushi Sawachi
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Method of determining output flow rate of gas output by flow rate c...
Patent number
10,316,835
Issue date
Jun 11, 2019
Tokyo Electron Limited
Jun Yamashima
B81 - MICRO-STRUCTURAL TECHNOLOGY
Patents Applications
last 30 patents
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Patent Application
METHOD OF DETERMINING OUTPUT FLOW RATE OF GAS OUTPUT BY FLOW RATE C...
Publication number
20180106247
Publication date
Apr 19, 2018
TOKYO ELECTRON LIMITED
Jun YAMASHIMA
F04 - POSITIVE DISPLACEMENT MACHINES FOR LIQUIDS PUMPS FOR LIQUIDS OR ELASTIC...
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Patent Application
GAS SUPPLY SYSTEM, PLASMA PROCESSING APPARATUS, AND OPERATION METHO...
Publication number
20170159180
Publication date
Jun 8, 2017
TOKYO ELECTRON LIMITED
Atsushi Sawachi
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...