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Jung Chul Park
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Pleasanton, CA, US
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Patents Grants
last 30 patents
Information
Patent Grant
Method for performing pattern decomposition based on feature pitch
Patent number
8,615,126
Issue date
Dec 24, 2013
ASML Masktools B.V.
Jung Chul Park
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Method and apparatus for performing model-based OPC for pattern dec...
Patent number
8,391,605
Issue date
Mar 5, 2013
ASML Masktools B.V.
Duan-Fu Stephen Hsu
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Grant
Method and apparatus for performing model-based OPC for pattern dec...
Patent number
8,111,921
Issue date
Feb 7, 2012
ASML Masktools B.V.
Duan-Fu Stephen Hsu
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Grant
Method for performing pattern decomposition based on feature pitch
Patent number
7,970,198
Issue date
Jun 28, 2011
ASML Masktools B.V.
Jung Chul Park
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
CPL mask and a method and program product for generating the same
Patent number
7,892,703
Issue date
Feb 22, 2011
ASML Masktools B.V.
Jang Fung Chen
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Patents Applications
last 30 patents
Information
Patent Application
Method and Apparatus for Performing Model-Based OPC for Pattern Dec...
Publication number
20130182940
Publication date
Jul 18, 2013
ASML NETHERLANDS B.V.
Duan-Fu Stephen Hsu
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Application
Method and Apparatus for Performing Model-Based OPC for Pattern Dec...
Publication number
20120122023
Publication date
May 17, 2012
ASML MASKTOOLS B.V.
Duan-Fu Stephen Hsu
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Application
Method for Performing Pattern Decomposition Based on Feature Pitch
Publication number
20110317908
Publication date
Dec 29, 2011
ASML MaskTools B.V.
Jung Chul Park
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Method for performing pattern decomposition based on feature pitch
Publication number
20080144969
Publication date
Jun 19, 2008
Jung Chul Park
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Method and apparatus for performing model-based OPC for pattern dec...
Publication number
20080069432
Publication date
Mar 20, 2008
Duan-Fu Stephen Hsu
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Application
CPL mask and a method and program product for generating the same
Publication number
20070065733
Publication date
Mar 22, 2007
Jang Fung Chen
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY