Junghwan Sung

Person

Los Altos, CA, US

People

Patents Grantslast 30 patents

Information Patent Grant
Deposition of tungsten nitride
- Patent number 7,691,749
- Issue date Apr 6, 2010
- Novellus Systems, Inc.
- Karl B. Levy
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of forming low-resistivity tungsten interconnects
- Patent number 7,262,125
- Issue date Aug 28, 2007
- Novellus Systems, Inc.
- Panya Wongsenakhum
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method for reducing tungsten film roughness and improving step cove...
- Patent number 7,141,494
- Issue date Nov 28, 2006
- Novellus Systems, Inc.
- Sang-Hyeob Lee
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for preventing and cleaning ruthenium-containing deposits in...
- Patent number 7,107,998
- Issue date Sep 19, 2006
- Novellus Systems, Inc.
- Harold F. R. Greer
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Deposition of tungsten nitride
- Patent number 7,005,372
- Issue date Feb 28, 2006
- Novellus Systems, Inc.
- Karl B. Levy
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Methods of forming tungsten nucleation layer
- Patent number 6,905,543
- Issue date Jun 14, 2005
- Novellus Systems, Inc.
- James A. Fair
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
Deposition of tungsten nitride
- Publication number 20060094238
- Publication date May 4, 2006
- Novellus Systems, Inc.
- Karl B. Levy
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Method for preventing and cleaning ruthenium-containing deposits in...
- Publication number 20050081882
- Publication date Apr 21, 2005
- Novellus Systems, Inc.
- Harold F.R. Greer
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Method for reducing tungsten film roughness and improving step cove...
- Publication number 20050031786
- Publication date Feb 10, 2005
- Novellus Systems, Inc.
- Sang-Hyeob Lee
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Method of forming low-resistivity tungsten interconnects
- Publication number 20040202786
- Publication date Oct 14, 2004
- Novellus Systems, Inc.
- Panya Wongsenakhum
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Deposition of tungsten nitride
- Publication number 20040142557
- Publication date Jul 22, 2004
- Novellus Systems, Inc.
- Karl B. Levy
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Junghwan Sung

Person

Patents Grantslast 30 patents

Deposition of tungsten nitride

Method of forming low-resistivity tungsten interconnects

Method for reducing tungsten film roughness and improving step cove...

Method for preventing and cleaning ruthenium-containing deposits in...

Deposition of tungsten nitride

Methods of forming tungsten nucleation layer

Patents Applicationslast 30 patents

Deposition of tungsten nitride

Method for preventing and cleaning ruthenium-containing deposits in...

Method for reducing tungsten film roughness and improving step cove...

Method of forming low-resistivity tungsten interconnects

Deposition of tungsten nitride