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Patents Grants
last 30 patents
Information
Patent Grant
System for fabricating a semiconductor device
Patent number
10,892,142
Issue date
Jan 12, 2021
Samsung Electronics Co., Ltd.
Sangjean Jeon
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Ring assembly and chuck assembly having the same
Patent number
10,672,629
Issue date
Jun 2, 2020
Samsung Electronics Co., Ltd.
SungHyup Kim
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Ring member with air holes and substrate processing system includin...
Patent number
10,312,059
Issue date
Jun 4, 2019
Samsung Electronics Co., Ltd.
Chulkyun Seok
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
Information
Patent Application
EDGE RING, DRY ETCHING APPARATUS HAVING THE SAME, AND OPERATION MET...
Publication number
20240071732
Publication date
Feb 29, 2024
Samsung Electronics Co., Ltd.
Hyun-Sik HWANG
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD OF MANUFACTURING INTEGRATED CIRCUIT USING ETCHING PROCESS
Publication number
20230110643
Publication date
Apr 13, 2023
Samsung Electronics Co., Ltd.
Junghwan UM
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SYSTEM FOR FABRICATING A SEMICONDUCTOR DEVICE
Publication number
20190287766
Publication date
Sep 19, 2019
Samsung Electronics Co., Ltd.
SANGJEAN JEON
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
RING ASSEMBLY AND CHUCK ASSEMBLY HAVING THE SAME
Publication number
20180090344
Publication date
Mar 29, 2018
Samsung Electronics Co., Ltd.
SungHyup KIM
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
RING MEMBER WITH AIR HOLES AND SUBSTRATE PROCESSING SYSTEM INCLUDIN...
Publication number
20170069471
Publication date
Mar 9, 2017
Samsung Electronics Co., Ltd.
Chulkyun SEOK
H01 - BASIC ELECTRIC ELEMENTS