Jungwan Sung

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Santa Clara, CA, US

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Patents Grantslast 30 patents

Information Patent Grant
Selective refractory metal and nitride capping
- Patent number 7,157,798
- Issue date Jan 2, 2007
- Novellus Systems, Inc.
- James A. Fair
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
ALD of tantalum using a hydride reducing agent
- Patent number 7,144,806
- Issue date Dec 5, 2006
- Novellus Systems, Inc.
- James A. Fair
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Selective refractory metal and nitride capping
- Patent number 6,844,258
- Issue date Jan 18, 2005
- Novellus Systems, Inc.
- James A. Fair
- H01 - BASIC ELECTRIC ELEMENTS