Junichi AKIBA

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Kurokawa-gun, JP

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Patents Grantslast 30 patents

Information Patent Grant
Method of determining output flow rate of gas output by flow rate c...
- Patent number 10,316,835
- Issue date Jun 11, 2019
- Tokyo Electron Limited
- Jun Yamashima
- B81 - MICRO-STRUCTURAL TECHNOLOGY

Patents Applicationslast 30 patents

Information Patent Application
METHOD OF DETERMINING OUTPUT FLOW RATE OF GAS OUTPUT BY FLOW RATE C...
- Publication number 20180106247
- Publication date Apr 19, 2018
- TOKYO ELECTRON LIMITED
- Jun YAMASHIMA
- F04 - POSITIVE DISPLACEMENT MACHINES FOR LIQUIDS PUMPS FOR LIQUIDS OR ELASTIC...