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Thin-film forming apparatus
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Patent number 5,804,046
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Issue date Sep 8, 1998
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Japan Energy Corporation
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Susumu Sawada
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C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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Silicide targets for sputtering
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Patent number 5,618,397
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Issue date Apr 8, 1997
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Japan Energy Corporation
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Osamu Kano
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C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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Thin film deposition system
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Patent number 5,135,629
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Issue date Aug 4, 1992
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Nippon Mining Co., Ltd
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Susumi Sawada
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C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...