JUNICHI ARAMI

Person

Shenyang, CN

People

Patents Grantslast 30 patents

Information Patent Grant
Apparatus and method for processing wafer
- Patent number 12,020,975
- Issue date Jun 25, 2024
- PIOTECH INC.
- Junichi Arami
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Multiple section showerhead assembly
- Patent number 11,731,145
- Issue date Aug 22, 2023
- PIOTECH INC.
- Gregory Siu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of temperature measurement used in radio-frequency processin...
- Patent number 11,562,891
- Issue date Jan 24, 2023
- PIOTECH CO., LTD.
- Junichi Arami
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Wafer pedestal with contact array
- Patent number 11,437,253
- Issue date Sep 6, 2022
- PIOTECH CO., LTD.
- Junichi Arami
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Wafer susceptor apparatus with thermal insulation and method for ma...
- Patent number 11,088,012
- Issue date Aug 10, 2021
- PIOTECH INC.
- Junichi Arami
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
APPARATUS AND METHOD FOR PROCESSING WAFER
- Publication number 20240312828
- Publication date Sep 19, 2024
- PIOTECH INC.
- Junichi Arami
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MULTI-STATION PROCESSING CHAMBER FOR SEMICONDUCTOR
- Publication number 20230274957
- Publication date Aug 31, 2023
- PIOTECH CO., LTD.
- HUAQIANG TAN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
APPARATUS, SYSTEM, AND METHOD FOR IMPEDANCE ADJUSTMENT OF PROCESSIN...
- Publication number 20210398779
- Publication date Dec 23, 2021
- PIOTECH INC.
- Giyoul Kim
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
APPARATUS AND METHOD FOR PROCESSING WAFER
- Publication number 20210375661
- Publication date Dec 2, 2021
- PIOTECH INC.
- Junichi Arami
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
WAFER PEDESTAL WITH CONTACT ARRAY
- Publication number 20200381270
- Publication date Dec 3, 2020
- PIOTECH CO., LTD.
- JUNICHI ARAMI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MULTIPLE SECTION SHOWERHEAD ASSEMBLY
- Publication number 20200360943
- Publication date Nov 19, 2020
- PIOTECH CO., LTD.
- GREGORY SIU
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
MULTI-STATION PROCESSING CHAMBER FOR SEMICONDUCTOR
- Publication number 20200203197
- Publication date Jun 25, 2020
- PIOTECH CO., LTD.
- HUAQIANG TAN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD OF TEMPERATURE MEASUREMENT USED IN RADIO-FREQUENCY PROCESSIN...
- Publication number 20200176231
- Publication date Jun 4, 2020
- PIOTECH CO., LTD.
- JUNICHI ARAMI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
WAFER SUSCEPTOR APPARATUS WITH THERMAL INSULATION AND METHOD FOR MA...
- Publication number 20200161166
- Publication date May 21, 2020
- PIOTECH CO., LTD.
- JUNICHI ARAMI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
WAFFER PEDESTAL WITH HEATING MECHANISM AND REACTION CHAMBER INCLUDI...
- Publication number 20190341280
- Publication date Nov 7, 2019
- PIOTECH CO., LTD.
- JUNICHI ARAMI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
RF SIGNAL TRANSMITTING DEVICE USED IN PLASMA PROCESSING APPARATUS
- Publication number 20190057842
- Publication date Feb 21, 2019
- PIOTECH CO., LTD.
- JUNICHI ARAMI
- H01 - BASIC ELECTRIC ELEMENTS

JUNICHI ARAMI

Person

Patents Grantslast 30 patents

Apparatus and method for processing wafer

Multiple section showerhead assembly

Method of temperature measurement used in radio-frequency processin...

Wafer pedestal with contact array

Wafer susceptor apparatus with thermal insulation and method for ma...

Patents Applicationslast 30 patents

APPARATUS AND METHOD FOR PROCESSING WAFER

MULTI-STATION PROCESSING CHAMBER FOR SEMICONDUCTOR

APPARATUS, SYSTEM, AND METHOD FOR IMPEDANCE ADJUSTMENT OF PROCESSIN...

APPARATUS AND METHOD FOR PROCESSING WAFER

WAFER PEDESTAL WITH CONTACT ARRAY

MULTIPLE SECTION SHOWERHEAD ASSEMBLY

MULTI-STATION PROCESSING CHAMBER FOR SEMICONDUCTOR

METHOD OF TEMPERATURE MEASUREMENT USED IN RADIO-FREQUENCY PROCESSIN...

WAFER SUSCEPTOR APPARATUS WITH THERMAL INSULATION AND METHOD FOR MA...

WAFFER PEDESTAL WITH HEATING MECHANISM AND REACTION CHAMBER INCLUDI...

RF SIGNAL TRANSMITTING DEVICE USED IN PLASMA PROCESSING APPARATUS