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Junichi CHONAN
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Fukaya-shi, JP
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Patents Grants
last 30 patents
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Patent Grant
Exposure apparatus, exposure method, and device manufacturing method
Patent number
10,310,383
Issue date
Jun 4, 2019
Nikon Corporation
Junichi Chonan
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Exposure apparatus, exposure method, and device manufacturing method
Patent number
9,753,378
Issue date
Sep 5, 2017
Nikon Corporation
Junichi Chonan
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Exposure apparatus, exposure method, and device manufacturing method
Patent number
9,041,902
Issue date
May 26, 2015
Nikon Corporation
Junichi Chonan
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Patents Applications
last 30 patents
Information
Patent Application
EXPOSURE APPARATUS, EXPOSURE METHOD, AND DEVICE MANUFACTURING METHOD
Publication number
20170357160
Publication date
Dec 14, 2017
Nikon Corporation
Junichi CHONAN
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
EXPOSURE APPARATUS, EXPOSURE METHOD, AND DEVICE MANUFACTURING METHOD
Publication number
20150253678
Publication date
Sep 10, 2015
Nikon Corporation
Junichi CHONAN
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
EXPOSURE APPARATUS, EXPOSURE METHOD, DEVICE-MANUFACTURING METHOD, P...
Publication number
20130057837
Publication date
Mar 7, 2013
Nikon Corporation
Go ICHINOSE
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
EXPOSURE APPARATUS, EXPOSURE METHOD, AND DEVICE MANUFACTURING METHOD
Publication number
20120062860
Publication date
Mar 15, 2012
Nikon Corporation
Junichi CHONAN
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY