Junichi Fujimoto

Person

Naka-gun, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Capacitor cooling structure and laser apparatus
- Patent number 11,050,210
- Issue date Jun 29, 2021
- Gigaphoton Inc.
- Hisakazu Katsuumi
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Laser system or laser exposure system
- Patent number 10,495,890
- Issue date Dec 3, 2019
- Gigaphoton Inc.
- Osamu Wakabayashi
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Preliminary ionization discharge device and laser apparatus
- Patent number 9,748,727
- Issue date Aug 29, 2017
- Gigaphoton Inc.
- Kouji Kakizaki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Two-beam interference apparatus and two-beam interference exposure...
- Patent number 9,507,248
- Issue date Nov 29, 2016
- Gigaphoton Inc.
- Shinji Okazaki
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Laser chamber and discharge excitation gas laser apparatus
- Patent number 9,373,926
- Issue date Jun 21, 2016
- Gigaphoton Inc.
- Hiroaki Tsushima
- F16 - ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINT...
Information Patent Grant
Discharge-pumped gas laser device
- Patent number 9,225,139
- Issue date Dec 29, 2015
- Gigaphoton Inc.
- Akihiko Kurosu
- F16 - ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINT...
Information Patent Grant
Master oscillator system and laser apparatus
- Patent number 9,147,993
- Issue date Sep 29, 2015
- Gigaphoton Inc.
- Junichi Fujimoto
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Discharge-pumped gas laser device
- Patent number 9,059,554
- Issue date Jun 16, 2015
- Gigaphoton Inc.
- Akihiko Kurosu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Extreme ultraviolet light generation by polarized laser beam
- Patent number 9,055,657
- Issue date Jun 9, 2015
- Gigaphoton Inc.
- Tsukasa Hori
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Chamber apparatus and extreme ultraviolet light generation system
- Patent number 8,884,257
- Issue date Nov 11, 2014
- Gigaphoton Inc.
- Shinji Nagai
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Laser apparatus
- Patent number 8,855,164
- Issue date Oct 7, 2014
- Gigaphoton Inc.
- Yasufumi Kawasuji
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Chamber replacing method
- Patent number 8,813,329
- Issue date Aug 26, 2014
- Gigaphoton Inc.
- Junichi Fujimoto
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information Patent Grant
Holder device, chamber apparatus, and extreme ultraviolet light gen...
- Patent number 8,809,821
- Issue date Aug 19, 2014
- Gigaphoton Inc.
- Junichi Fujimoto
- G02 - OPTICS
Information Patent Grant
Chamber apparatus
- Patent number 8,748,853
- Issue date Jun 10, 2014
- Gigaphoton Inc.
- Shinji Nagai
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Laser apparatus
- Patent number 8,611,393
- Issue date Dec 17, 2013
- Gigaphoton Inc.
- Junichi Fujimoto
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Chamber replacing method
- Patent number 7,984,539
- Issue date Jul 26, 2011
- Gigaphoton Inc.
- Junichi Fujimoto
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information Patent Grant
Gas laser electrode, laser chamber employing the electrode, and gas...
- Patent number 7,006,546
- Issue date Feb 28, 2006
- Komatsu Ltd.
- Tsukasa Hori
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Discharge electrode and discharge electrode manufacturing method
- Patent number 6,810,061
- Issue date Oct 26, 2004
- Komatsu Ltd.
- Tsukasa Hori
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Gas supplementation method of excimer laser apparatus
- Patent number 6,130,904
- Issue date Oct 10, 2000
- Komatsu Ltd.
- Takanobu Ishihara
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Gas laser apparatus
- Patent number 5,663,977
- Issue date Sep 2, 1997
- Komatsu Ltd.
- Junichi Fujimoto
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Laser gas replenishing apparatus and method in excimer laser system
- Patent number 5,450,436
- Issue date Sep 12, 1995
- Kabushiki Kaisha Komatsu Seisakusho
- Hakaru Mizoguchi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Excimer laser apparatus
- Patent number 5,373,523
- Issue date Dec 13, 1994
- Kabushiki Kaisha Komatsu Seisakusho
- Junichi Fujimoto
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Gas laser apparatus
- Patent number 5,291,509
- Issue date Mar 1, 1994
- Kabushiki Kaisha Komatsu Seisakusho
- Hakaru Mizoguchi
- F16 - ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINT...
Information Patent Grant
Multi-mode narrow-band oscillation excimer laser
- Patent number 4,829,536
- Issue date May 9, 1989
- Kabushiki Kaisha Komatsu Seisakusho
- Koichi Kajiyama
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Patents Applicationslast 30 patents

Information Patent Application
DISCHARGE ELECTRODE, METHOD OF MANUFACTURING DISCHARGE ELECTRODE, A...
- Publication number 20240396282
- Publication date Nov 28, 2024
- Gigaphoton Inc.
- Yoichi SASAKI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
GAS LASER APPARATUS, GAS LASER APPARATUS MAINTENANCE METHOD, AND EL...
- Publication number 20240154381
- Publication date May 9, 2024
- Gigaphoton Inc.
- Junichi FUJIMOTO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CHAMBER DEVICE, AND ELECTRONIC DEVICE MANUFACTURING METHOD
- Publication number 20230387641
- Publication date Nov 30, 2023
- Gigaphoton Inc.
- Junichi FUJIMOTO
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
CHAMBER DEVICE, GAS LASER DEVICE, AND ELECTRONIC DEVICE MANUFACTURI...
- Publication number 20230387642
- Publication date Nov 30, 2023
- Gigaphoton Inc.
- Junichi FUJIMOTO
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
LASER APPARATUS, WAVELENGTH CONTROL METHOD, AND ELECTRONIC DEVICE M...
- Publication number 20230155343
- Publication date May 18, 2023
- Gigaphoton Inc.
- Junichi FUJIMOTO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
LASER PROCESSING METHOD AND CIRCUIT BOARD MANUFACTURING METHOD
- Publication number 20230071592
- Publication date Mar 9, 2023
- Gigaphoton Inc.
- Akira SUWA
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
CAPACITOR COOLING STRUCTURE AND LASER APPARATUS
- Publication number 20200136336
- Publication date Apr 30, 2020
- Gigaphoton Inc.
- Hisakazu KATSUUMI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SPHEROIDAL MIRROR REFLECTIVITY MEASURING APPARATUS FOR EXTREME ULTR...
- Publication number 20170336282
- Publication date Nov 23, 2017
- THE UNIVERSITY OF TOKYO
- Yohei KOBAYASHI
- G01 - MEASURING TESTING
Information Patent Application
LASER SYSTEM OR LASER EXPOSURE SYSTEM
- Publication number 20160313564
- Publication date Oct 27, 2016
- Gigaphoton Inc.
- Osamu WAKABAYASHI
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
PRELIMINARY IONIZATION DISCHARGE DEVICE AND LASER APPARATUS
- Publication number 20160172817
- Publication date Jun 16, 2016
- GIGAPHOTON INC.
- Kouji KAKIZAKI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
LASER CHAMBER AND DISCHARGE EXCITATION GAS LASER APPARATUS
- Publication number 20150249312
- Publication date Sep 3, 2015
- GIGAPHOTON INC.
- Hiroaki TSUSHIMA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
DISCHARGE-PUMPED GAS LASER DEVICE
- Publication number 20150055672
- Publication date Feb 26, 2015
- Gigaphoton Inc.
- Akihiko KUROSU
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
LASER APPARATUS
- Publication number 20140328364
- Publication date Nov 6, 2014
- Junichi Fujimoto
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
DISCHARGE-PUMPED GAS LASER DEVICE
- Publication number 20140105238
- Publication date Apr 17, 2014
- Gigaphoton Inc.
- Akihiko KUROSU
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
EXTREME ULTRAVIOLET LIGHT GENERATION APPARATUS AND EXTREME ULTRAVIO...
- Publication number 20130320232
- Publication date Dec 5, 2013
- Gigaphoton Inc.
- Tsukasa HORI
- G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
Information Patent Application
TWO-BEAM INTERFERENCE APPARATUS AND TWO-BEAM INTERFERENCE EXPOSURE...
- Publication number 20130135601
- Publication date May 30, 2013
- Gigaphoton Inc.
- Shinji OKAZAKI
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
HOLDER DEVICE, CHAMBER APPARATUS, AND EXTREME ULTRAVIOLET LIGHT GEN...
- Publication number 20130134330
- Publication date May 30, 2013
- GIGAPHOTON INC.
- Junichi FUJIMOTO
- G02 - OPTICS
Information Patent Application
CHAMBER APPARATUS AND EXTREME ULTRAVIOLET LIGHT GENERATION SYSTEM
- Publication number 20130126761
- Publication date May 23, 2013
- GIGAPHOTON INC.
- Shinji NAGAI
- G02 - OPTICS
Information Patent Application
LASER APPARATUS
- Publication number 20130114215
- Publication date May 9, 2013
- GIGAPHOTON INC.
- Yasufumi Kawasuji
- G02 - OPTICS
Information Patent Application
APPARATUS AND METHOD FOR GENERATING EXTREME ULTRAVIOLET LIGHT
- Publication number 20130105712
- Publication date May 2, 2013
- GIGAPHOTON INC.
- Tatsuya Yanagida
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
TARGET SUPPLY UNIT AND EXTREME ULTRAVIOLET LIGHT GENERATION APPARATUS
- Publication number 20130075625
- Publication date Mar 28, 2013
- GIGAPHOTON INC.
- Takayuki YABU
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
MASTER OSCILLATOR SYSTEM AND LASER APPARATUS
- Publication number 20130064258
- Publication date Mar 14, 2013
- Gigaphoton Inc.
- Junichi FUJIMOTO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
TARGET SUPPLY UNIT, MECHANISM FOR CLEANING NOZZLE THEREOF, AND METH...
- Publication number 20130032640
- Publication date Feb 7, 2013
- GIGAPHOTON INC.
- Takayuki YABU
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Application
CHAMBER APPARATUS
- Publication number 20120248343
- Publication date Oct 4, 2012
- GIGAPHOTON INC.
- Shinji NAGAI
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
LASER APPARATUS
- Publication number 20120236884
- Publication date Sep 20, 2012
- GIGAPHOTON INC.
- Junichi FUJIMOTO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
EXTREME ULTRAVIOLET LIGHT SOURCE SYSTEM
- Publication number 20120119118
- Publication date May 17, 2012
- GIGAPHOTON INC.
- Yukio WATANABE
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
LASER DEVICE, EXTREME ULTRAVIOLET LIGHT GENERATION DEVICE, AND METH...
- Publication number 20110309270
- Publication date Dec 22, 2011
- Yohichi Yamanouchi
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
CHAMBER REPLACING METHOD
- Publication number 20110232058
- Publication date Sep 29, 2011
- Junichi Fujimoto
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
EXTREME ULTRAVIOLET LIGHT SOURCE SYSTEM
- Publication number 20100193711
- Publication date Aug 5, 2010
- Yukio WATANABE
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Chamber replacing method
- Publication number 20080115342
- Publication date May 22, 2008
- Junichi Fujimoto
- H01 - BASIC ELECTRIC ELEMENTS

Junichi Fujimoto

Person

Patents Grantslast 30 patents

Capacitor cooling structure and laser apparatus

Laser system or laser exposure system

Preliminary ionization discharge device and laser apparatus

Two-beam interference apparatus and two-beam interference exposure...

Laser chamber and discharge excitation gas laser apparatus

Discharge-pumped gas laser device

Master oscillator system and laser apparatus

Discharge-pumped gas laser device

Extreme ultraviolet light generation by polarized laser beam

Chamber apparatus and extreme ultraviolet light generation system

Laser apparatus

Chamber replacing method

Holder device, chamber apparatus, and extreme ultraviolet light gen...

Chamber apparatus

Laser apparatus

Chamber replacing method

Gas laser electrode, laser chamber employing the electrode, and gas...

Discharge electrode and discharge electrode manufacturing method

Gas supplementation method of excimer laser apparatus

Gas laser apparatus

Laser gas replenishing apparatus and method in excimer laser system

Excimer laser apparatus

Gas laser apparatus

Multi-mode narrow-band oscillation excimer laser

Patents Applicationslast 30 patents

DISCHARGE ELECTRODE, METHOD OF MANUFACTURING DISCHARGE ELECTRODE, A...

GAS LASER APPARATUS, GAS LASER APPARATUS MAINTENANCE METHOD, AND EL...

CHAMBER DEVICE, AND ELECTRONIC DEVICE MANUFACTURING METHOD

CHAMBER DEVICE, GAS LASER DEVICE, AND ELECTRONIC DEVICE MANUFACTURI...

LASER APPARATUS, WAVELENGTH CONTROL METHOD, AND ELECTRONIC DEVICE M...

LASER PROCESSING METHOD AND CIRCUIT BOARD MANUFACTURING METHOD

CAPACITOR COOLING STRUCTURE AND LASER APPARATUS

SPHEROIDAL MIRROR REFLECTIVITY MEASURING APPARATUS FOR EXTREME ULTR...

LASER SYSTEM OR LASER EXPOSURE SYSTEM

PRELIMINARY IONIZATION DISCHARGE DEVICE AND LASER APPARATUS

LASER CHAMBER AND DISCHARGE EXCITATION GAS LASER APPARATUS

DISCHARGE-PUMPED GAS LASER DEVICE

LASER APPARATUS

DISCHARGE-PUMPED GAS LASER DEVICE

EXTREME ULTRAVIOLET LIGHT GENERATION APPARATUS AND EXTREME ULTRAVIO...

TWO-BEAM INTERFERENCE APPARATUS AND TWO-BEAM INTERFERENCE EXPOSURE...

HOLDER DEVICE, CHAMBER APPARATUS, AND EXTREME ULTRAVIOLET LIGHT GEN...

CHAMBER APPARATUS AND EXTREME ULTRAVIOLET LIGHT GENERATION SYSTEM

LASER APPARATUS

APPARATUS AND METHOD FOR GENERATING EXTREME ULTRAVIOLET LIGHT

TARGET SUPPLY UNIT AND EXTREME ULTRAVIOLET LIGHT GENERATION APPARATUS

MASTER OSCILLATOR SYSTEM AND LASER APPARATUS

TARGET SUPPLY UNIT, MECHANISM FOR CLEANING NOZZLE THEREOF, AND METH...

CHAMBER APPARATUS

LASER APPARATUS

EXTREME ULTRAVIOLET LIGHT SOURCE SYSTEM

LASER DEVICE, EXTREME ULTRAVIOLET LIGHT GENERATION DEVICE, AND METH...

CHAMBER REPLACING METHOD

EXTREME ULTRAVIOLET LIGHT SOURCE SYSTEM

Chamber replacing method