Junichi Kanbe

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Hyogo, JP

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Patents Grantslast 30 patents

Information Patent Grant
Focusing method in photolithography
- Patent number 5,561,495
- Issue date Oct 1, 1996
- Mitsubishi Denki Kabushiki Kaisha
- Eiichi Ishikawa
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY