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Exposure apparatus
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Patent number 12,265,337
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Issue date Apr 1, 2025
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ASML Netherlands B.V.
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Junichi Kanehara
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G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
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Measurement apparatus
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Patent number 11,874,103
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Issue date Jan 16, 2024
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ASML Netherlands B.V.
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Franciscus Godefridus Casper Bijnen
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G01 - MEASURING TESTING
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Measurement apparatus
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Patent number 11,105,619
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Issue date Aug 31, 2021
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ASML Netherlands B.V.
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Franciscus Godefridus Casper Bijnen
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G01 - MEASURING TESTING
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Exposure apparatus
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Patent number 11,092,903
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Issue date Aug 17, 2021
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ASML Netherlands B.V.
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Junichi Kanehara
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G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY