Junichi Motojima

Person

Utsunomiya-shi, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Control device, control method, lithographic apparatus, method of m...
- Patent number 11,112,701
- Issue date Sep 7, 2021
- Canon Kabushiki Kaisha
- Mitsuhide Nishimura
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Exposure apparatus, method thereof, and method of manufacturing art...
- Patent number 10,635,005
- Issue date Apr 28, 2020
- Canon Kabushiki Kaisha
- Mitsuhide Nishimura
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Control device, lithography apparatus, and method of manufacturing...
- Patent number 10,558,128
- Issue date Feb 11, 2020
- Canon Kabushiki Kaisha
- Koji Yoshida
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Exposure apparatus, exposure method, and method of manufacturing ar...
- Patent number 10,234,775
- Issue date Mar 19, 2019
- Canon Kabushiki Kaisha
- Shinichiro Hirai
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Exposure apparatus, and device manufacturing method
- Patent number 8,077,290
- Issue date Dec 13, 2011
- Canon Kabushiki Kaisha
- Junichi Motojima
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Patents Applicationslast 30 patents

Information Patent Application
EXPOSURE APPARATUS, EXPOSURE METHOD, AND ARTICLE MANUFACTURING METHOD
- Publication number 20240361707
- Publication date Oct 31, 2024
- Canon Kabushiki Kaisha
- JUNICHI MOTOJIMA
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
CONTROL APPARATUS, LITHOGRAPHY APPARATUS, AND ARTICLE MANUFACTURING...
- Publication number 20230057796
- Publication date Feb 23, 2023
- Canon Kabushiki Kaisha
- Mitsuhide Nishimura
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
CONTROL DEVICE, CONTROL METHOD, LITHOGRAPHIC APPARATUS, METHOD OF M...
- Publication number 20210088914
- Publication date Mar 25, 2021
- Canon Kabushiki Kaisha
- Mitsuhide Nishimura
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CONTROL DEVICE, LITHOGRAPHY APPARATUS, AND METHOD OF MANUFACTURING...
- Publication number 20190339624
- Publication date Nov 7, 2019
- Canon Kabushiki Kaisha
- Koji Yoshida
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
EXPOSURE APPARATUS, METHOD THEREOF, AND METHOD OF MANUFACTURING ART...
- Publication number 20190265599
- Publication date Aug 29, 2019
- Canon Kabushiki Kaisha
- Mitsuhide Nishimura
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
EXPOSURE APPARATUS, EXPOSURE METHOD, AND METHOD OF MANUFACTURING AR...
- Publication number 20180143542
- Publication date May 24, 2018
- Canon Kabushiki Kaisha
- Shinichiro Hirai
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SCANNING EXPOSURE APPARATUS AND DEVICE MANUFACTURING METHOD
- Publication number 20100103393
- Publication date Apr 29, 2010
- Canon Kabushiki Kaisha
- Junichi Motojima
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
EXPOSURE APPARATUS, AND DEVICE MANUFACTURING METHOD
- Publication number 20070285641
- Publication date Dec 13, 2007
- Junichi Motojima
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Junichi Motojima

Person

Patents Grantslast 30 patents

Control device, control method, lithographic apparatus, method of m...

Exposure apparatus, method thereof, and method of manufacturing art...

Control device, lithography apparatus, and method of manufacturing...

Exposure apparatus, exposure method, and method of manufacturing ar...

Exposure apparatus, and device manufacturing method

Patents Applicationslast 30 patents

EXPOSURE APPARATUS, EXPOSURE METHOD, AND ARTICLE MANUFACTURING METHOD

CONTROL APPARATUS, LITHOGRAPHY APPARATUS, AND ARTICLE MANUFACTURING...

CONTROL DEVICE, CONTROL METHOD, LITHOGRAPHIC APPARATUS, METHOD OF M...

CONTROL DEVICE, LITHOGRAPHY APPARATUS, AND METHOD OF MANUFACTURING...

EXPOSURE APPARATUS, METHOD THEREOF, AND METHOD OF MANUFACTURING ART...

EXPOSURE APPARATUS, EXPOSURE METHOD, AND METHOD OF MANUFACTURING AR...

SCANNING EXPOSURE APPARATUS AND DEVICE MANUFACTURING METHOD

EXPOSURE APPARATUS, AND DEVICE MANUFACTURING METHOD