Junichi Murakami

Person

Ehime, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Method of controlling mover device
- Patent number 7,597,531
- Issue date Oct 6, 2009
- SEN Corporation, an SHI and Axcelis Company
- Keiji Okada
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Irradiation system with ion beam/charged particle beam
- Patent number 7,315,034
- Issue date Jan 1, 2008
- SEN Corporation, an SHI and Axcelis Company
- Takanori Yagita
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Wafer charge compensation device and ion implantation system having...
- Patent number 7,304,319
- Issue date Dec 4, 2007
- SEN Corporation, an SHI and Axcelis Company
- Hiroshi Kawaguchi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Beam space-charge compensation device and ion implantation system h...
- Patent number 7,276,711
- Issue date Oct 2, 2007
- SEN Corporation, an SHI and Axcelis Company
- Hiroshi Kawaguchi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Mover device and semiconductor manufacturing apparatus and method
- Patent number 7,187,143
- Issue date Mar 6, 2007
- Sumitomo Eaton Nova, Corporation
- Keiji Okada
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Beam deflecting method, beam deflector for scanning, ion implantati...
- Patent number 7,138,641
- Issue date Nov 21, 2006
- Sumitomo Eaton Nova Corporation
- Hiroshi Matsushita
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Ion implantation capable of uniformly injecting an ion beam into a...
- Patent number 5,030,835
- Issue date Jul 9, 1991
- Sumitomo Eaton Nova Corporation
- Tadamoto Tamai
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Ion implantation apparatus capable of avoiding electrification of a...
- Patent number 4,994,674
- Issue date Feb 19, 1991
- Sumitomo Eaton Nova Corporation
- Tadamoto Tamai
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
Beam deflecting method, beam deflector for scanning, ion implantati...
- Publication number 20060113490
- Publication date Jun 1, 2006
- SUMITOMO EATON NOVA CORPORATION
- Hiroshi Matsushita
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Beam space-charge compensation device and ion implantation system h...
- Publication number 20060113491
- Publication date Jun 1, 2006
- SUMITOMO EATON NOVA CORPORATION
- Hiroshi Kawaguchi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Wafer charge compensation device and ion implantation system having...
- Publication number 20060113492
- Publication date Jun 1, 2006
- SUMITOMO EATON NOVA CORPORATION
- Hiroshi Kawaguchi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Irradiation system with ion beam/charged particle beam
- Publication number 20060113467
- Publication date Jun 1, 2006
- SUMITOMO EATON NOVA CORPORATION
- Takanori Yagita
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Method of controlling mover device, cooperative device of mover dev...
- Publication number 20050188924
- Publication date Sep 1, 2005
- Keiji Okada
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Mover device and semiconductor manufacturing apparatus and method
- Publication number 20040194565
- Publication date Oct 7, 2004
- Sumitomo Eaton Nova, Corporation
- Keiji Okada
- H01 - BASIC ELECTRIC ELEMENTS

Junichi Murakami

Person

Patents Grantslast 30 patents

Method of controlling mover device

Irradiation system with ion beam/charged particle beam

Wafer charge compensation device and ion implantation system having...

Beam space-charge compensation device and ion implantation system h...

Mover device and semiconductor manufacturing apparatus and method

Beam deflecting method, beam deflector for scanning, ion implantati...

Ion implantation capable of uniformly injecting an ion beam into a...

Ion implantation apparatus capable of avoiding electrification of a...

Patents Applicationslast 30 patents

Beam deflecting method, beam deflector for scanning, ion implantati...

Beam space-charge compensation device and ion implantation system h...

Wafer charge compensation device and ion implantation system having...

Irradiation system with ion beam/charged particle beam

Method of controlling mover device, cooperative device of mover dev...

Mover device and semiconductor manufacturing apparatus and method