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Junichi Nagata
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Kumamoto, JP
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last 30 patents
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Patent Grant
Processing apparatus with a gas distributor having back and forth p...
Patent number
5,445,699
Issue date
Aug 29, 1995
Tokyo Electron Kyushu Limited
Yuuji Kamikawa
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...