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Junichi Nitta
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Chiba-ken, JP
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Patent Application
Sputtering target as well as a joined type sputtering target assemb...
Publication number
20070251820
Publication date
Nov 1, 2007
Ulvac Materials, Inc.
Junichi Nitta
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...