Junichi OGAWA

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Nirasaki City, JP

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Patents Grantslast 30 patents

Information Patent Grant
Substrate processing apparatus
- Patent number 9,766,617
- Issue date Sep 19, 2017
- Tokyo Electron Limited
- Junichi Ogawa
- G05 - CONTROLLING REGULATING

Patents Applicationslast 30 patents

Information Patent Application
SUBSTRATE PROCESSING APPARATUS
- Publication number 20140121814
- Publication date May 1, 2014
- TOKYO ELECTRON LIMITED
- Junichi OGAWA
- H01 - BASIC ELECTRIC ELEMENTS