Junichi Sasaki

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Hwaseng City, KR

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Patents Grantslast 30 patents

Information Patent Grant
Plasma etching method, plasma etching apparatus, and computer-reada...
- Patent number 8,609,549
- Issue date Dec 17, 2013
- Tokyo Electron Limited
- Sungtae Lee
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
PLASMA ETCHING METHOD, PLASMA ETCHING APPARATUS, AND COMPUTER-READA...
- Publication number 20110250761
- Publication date Oct 13, 2011
- TOKYO ELECTRON LIMITED
- Sungtae LEE
- H01 - BASIC ELECTRIC ELEMENTS