Junichi Sasaki

Follow

Person

Dresden, DE

People

Patents Grantslast 30 patents

Information Patent Grant
Method for adjusting a critical dimension in a high aspect ratio fe...
- Patent number 7,732,340
- Issue date Jun 8, 2010
- Tokyo Electron Limited
- Toshifumi Nagaiwa
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
METHOD FOR ADJUSTING A CRITICAL DIMENSION IN A HIGH ASPECT RATIO FE...
- Publication number 20080038673
- Publication date Feb 14, 2008
- TOKYO ELECTRON LIMITED
- Toshifumi Nagaiwa
- H01 - BASIC ELECTRIC ELEMENTS