Junichi Takahira

Follow

Person

Niiza-Shi, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Plasma processing unit and high-frequency electric power supplying...
- Patent number 8,628,640
- Issue date Jan 14, 2014
- Tokyo Electron Limited
- Toshihiro Hayami
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
Plasma processing unit and high-frequency electric power supplying...
- Publication number 20040154540
- Publication date Aug 12, 2004
- Toshihiro Hayami
- H01 - BASIC ELECTRIC ELEMENTS