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Junichi TAKEI

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Patents Grantslast 30 patents

  • Information Patent Grant

    Sputtering device
    • Patent number 11,414,747
    • Issue date Aug 16, 2022
    • Tokyo Electron Limited
    • Junichi Takei
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    Film-forming device
    • Patent number 11,410,837
    • Issue date Aug 9, 2022
    • Tokyo Electron Limited
    • Hiroyuki Toshima
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    Sputtering apparatus
    • Patent number 11,149,342
    • Issue date Oct 19, 2021
    • Tokyo Electron Limited
    • Junichi Takei
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    Film forming apparatus
    • Patent number 10,392,688
    • Issue date Aug 27, 2019
    • Tokyo Electron Limited
    • Junichi Takei
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

  • Information Patent Application

    FILM FORMING APPARATUS
    • Publication number 20230411131
    • Publication date Dec 21, 2023
    • TOKYO ELECTRON LIMITED
    • Junichi TAKEI
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    VACUUM HEAT TREATMENT APPARATUS
    • Publication number 20230407424
    • Publication date Dec 21, 2023
    • TOKYO ELECTRON LIMITED
    • Junichi TAKEI
    • C21 - METALLURGY OF IRON
  • Information Patent Application

    SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS
    • Publication number 20230349036
    • Publication date Nov 2, 2023
    • TOKYO ELECTRON LIMITED
    • Masato SHINADA
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    FILM FORMING APPARATUS
    • Publication number 20230167542
    • Publication date Jun 1, 2023
    • TOKYO ELECTRON LIMITED
    • Junichi TAKEI
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    SPUTTER DEVICE
    • Publication number 20210262080
    • Publication date Aug 26, 2021
    • TOKYO ELECTRON LIMITED
    • Junichi TAKEI
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    SPUTTERING APPARATUS
    • Publication number 20200255935
    • Publication date Aug 13, 2020
    • TOKYO ELECTRON LIMITED
    • Junichi Takei
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    FILM-FORMING DEVICE
    • Publication number 20200071815
    • Publication date Mar 5, 2020
    • TOKYO ELECTRON LIMITED
    • Hiroyuki TOSHIMA
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    SUBSTRATE STAGE AND FILM FORMING APPARATUS
    • Publication number 20190390326
    • Publication date Dec 26, 2019
    • TOKYO ELECTRON LIMITED
    • Junichi Takei
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    SPUTTERING DEVICE
    • Publication number 20190390325
    • Publication date Dec 26, 2019
    • TOKYO ELECTRON LIMITED
    • Junichi TAKEI
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    FILM FORMING APPARATUS
    • Publication number 20180155817
    • Publication date Jun 7, 2018
    • Junichi TAKEI
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...