Junichi Tanaka

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Niihari-gun, JP

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Patents Grantslast 30 patents

Information Patent Grant
Plasma processing apparatus and plasma processing method
- Patent number 6,902,683
- Issue date Jun 7, 2005
- Hitachi, Ltd.
- Tetsunori Kaji
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Plasma processing apparatus and plasma processing method
- Patent number 6,197,151
- Issue date Mar 6, 2001
- Hitachi, Ltd.
- Tetsunori Kaji
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Plasma processing apparatus and plasma processing method
- Patent number 6,129,806
- Issue date Oct 10, 2000
- Hitachi, Ltd.
- Tetsunori Kaji
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
Plasma processing apparatus and plasma processing method
- Publication number 20060144518
- Publication date Jul 6, 2006
- Tetsunori Kaji
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Plasma processing apparatus
- Publication number 20050082006
- Publication date Apr 21, 2005
- Tetsunori Kaji
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Plasma processing apparatus
- Publication number 20040178180
- Publication date Sep 16, 2004
- Tetsunori Kaji
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Plasma processing apparatus and plasma processing method
- Publication number 20020069971
- Publication date Jun 13, 2002
- Tetsunori Kaji
- H01 - BASIC ELECTRIC ELEMENTS