TREA

Junichiro MATSUNAGA

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  • Nirasaki City, JP
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Patents Grantslast 30 patents

  • Information Patent Grant

    Substrate processing method and substrate processing apparatus
    • Patent number 12,054,824
    • Issue date Aug 6, 2024
    • Tokyo Electron Limited
    • Nobuhiro Takahashi
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    Substrate processing method and storage medium
    • Patent number 11,342,192
    • Issue date May 24, 2022
    • Tokyo Electron Limited
    • Nobuhiro Takahashi
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Grant

    Etching method
    • Patent number 10,312,079
    • Issue date Jun 4, 2019
    • Tokyo Electron Limited
    • Koji Takeya
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    Etching method
    • Patent number 9,691,630
    • Issue date Jun 27, 2017
    • Tokyo Electron Limited
    • Nobuhiro Takahashi
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Grant

    Etching method and storage medium
    • Patent number 9,607,855
    • Issue date Mar 28, 2017
    • Tokyo Electron Limited
    • Nobuhiro Takahashi
    • H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

  • Information Patent Application

    SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS
    • Publication number 20220380892
    • Publication date Dec 1, 2022
    • TOKYO ELECTRON LIMITED
    • Nobuhiro TAKAHASHI
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    SUBSTRATE PROCESSING METHOD AND STORAGE MEDIUM
    • Publication number 20200105539
    • Publication date Apr 2, 2020
    • TOKYO ELECTRON LIMITED
    • Nobuhiro TAKAHASHI
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    ETCHING METHOD
    • Publication number 20170309478
    • Publication date Oct 26, 2017
    • TOKYO ELECTRON LIMITED
    • Koji TAKEYA
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    ETCHING METHOD AND STORAGE MEDIUM
    • Publication number 20160225637
    • Publication date Aug 4, 2016
    • TOKYO ELECTRON LIMITED
    • Nobuhiro TAKAHASHI
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    ETCHING METHOD
    • Publication number 20160086814
    • Publication date Mar 24, 2016
    • TOKYO ELECTRON LIMITED
    • Nobuhiro TAKAHASHI
    • H01 - BASIC ELECTRIC ELEMENTS