Junichirou Tsutsui

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Kanagawa, JP

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Patents Grantslast 30 patents

Information Patent Grant
Vertical substrate transfer apparatus and film-forming apparatus
- Patent number 8,128,793
- Issue date Mar 6, 2012
- ULVAC, Inc.
- Hajime Nakamura
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
Vertical Substrate Transfer Apparatus and Film-Forming Apparatus
- Publication number 20090139864
- Publication date Jun 4, 2009
- Hajime Nakamura
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...