Junji Ishibashi

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Kurokawa-gun, JP

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Patents Grantslast 30 patents

Information Patent Grant
Plasma processing apparatus, processing method, and upper electrode...
- Patent number 11,488,807
- Issue date Nov 1, 2022
- Tokyo Electron Limited
- Kota Shihommatsu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Plasma processing apparatus
- Patent number 10,115,567
- Issue date Oct 30, 2018
- Tokyo Electron Limited
- Taichi Hirano
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Power supply system, plasma processing apparatus and power supply c...
- Patent number 10,056,230
- Issue date Aug 21, 2018
- Tokyo Electron Limited
- Taichi Hirano
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
PLASMA PROCESSING APPARATUS
- Publication number 20230077143
- Publication date Mar 9, 2023
- TOKYO ELECTRON LIMITED
- Chishio KOSHIMIZU
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PLASMA PROCESSING APPARATUS, PROCESSING METHOD, AND UPPER ELECTRODE...
- Publication number 20210074520
- Publication date Mar 11, 2021
- TOKYO ELECTRON LIMITED
- Kota SHIHOMMATSU
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
FOCUS RING AND SUBSTRATE PROCESSING APPARATUS
- Publication number 20180182635
- Publication date Jun 28, 2018
- TOKYO ELECTRON LIMITED
- Toshiya Tsukahara
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
POWER SUPPLY SYSTEM, PLASMA PROCESSING APPARATUS AND POWER SUPPLY C...
- Publication number 20160284514
- Publication date Sep 29, 2016
- TOKYO ELECTRON LIMITED
- Taichi Hirano
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PLASMA PROCESSING APPARATUS
- Publication number 20160079037
- Publication date Mar 17, 2016
- TOKYO ELECTRON LIMITED
- Taichi Hirano
- H01 - BASIC ELECTRIC ELEMENTS