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Junji ISHIHARA
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Kanagawa, JP
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last 30 patents
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Patent Application
DRYING APPARATUS, DRY CONDITION CONFIRMATION METHOD, AND WAFER STOR...
Publication number
20240328713
Publication date
Oct 3, 2024
SHIBAURA MECHATRONICS CORPORATION
Yukinobu NISHIBE
F26 - DRYING
Information
Patent Application
WAFER STORAGE CONTAINER DRYING APPARATUS AND CLEANING SYSTEM
Publication number
20240302099
Publication date
Sep 12, 2024
SHIBAURA MECHATRONICS CORPORATION
Junji ISHIHARA
B08 - CLEANING
Information
Patent Application
CLEANING APPARATUS FOR WAFER STORAGE CONTAINER
Publication number
20240091828
Publication date
Mar 21, 2024
SHIBAURA MECHATRONICS CORPORATION
Junji ISHIHARA
B08 - CLEANING
Information
Patent Application
MAINTENANCE METHOD AND HEAT TREATMENT APPARATUS
Publication number
20230107154
Publication date
Apr 6, 2023
SHIBAURA MECHATRONICS CORPORATION
Junji ISHIHARA
B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...