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Junji KUNISAWA
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Tokyo, JP
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Patents Grants
last 30 patents
Information
Patent Grant
Apparatus for supplying liquid, cleaning unit, and apparatus for pr...
Patent number
12,140,980
Issue date
Nov 12, 2024
Ebara Corporation
Fujihiko Toyomasu
B24 - GRINDING POLISHING
Information
Patent Grant
Jig and installation method using same jig
Patent number
12,053,851
Issue date
Aug 6, 2024
Ebara Corporation
Lien Yin Cheng
B24 - GRINDING POLISHING
Information
Patent Grant
Damper control system and damper control method
Patent number
11,967,508
Issue date
Apr 23, 2024
Ebara Corporation
Akira Imamura
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Cleaning chemical liquid supply device and cleaning chemical liquid...
Patent number
11,890,652
Issue date
Feb 6, 2024
Ebara Corporation
Fujihiko Toyomasu
B08 - CLEANING
Information
Patent Grant
Cleaning device, polishing device, and device and method for calcul...
Patent number
11,664,252
Issue date
May 30, 2023
Ebara Corporation
Michiaki Matsuda
B08 - CLEANING
Information
Patent Grant
Substrate cleaning apparatus, substrate processing apparatus, and m...
Patent number
11,532,491
Issue date
Dec 20, 2022
Ebara Corporation
Hisajiro Nakano
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Substrate processing apparatus, substrate processing method, substr...
Patent number
11,426,834
Issue date
Aug 30, 2022
Ebara Corporation
Mitsuru Miyazaki
B24 - GRINDING POLISHING
Information
Patent Grant
Carrier device, work processing apparatus, control method of carrie...
Patent number
11,380,559
Issue date
Jul 5, 2022
Ebara Corporation
Yohei Eto
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Buff processing device and substrate processing device
Patent number
11,103,972
Issue date
Aug 31, 2021
Ebara Corporation
Hideo Aizawa
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Cleaning apparatus and substrate processing apparatus
Patent number
11,056,359
Issue date
Jul 6, 2021
Ebara Corporation
Teruaki Hombo
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Liquid supplying device and liquid supplying method
Patent number
10,926,301
Issue date
Feb 23, 2021
Ebara Corporation
Fujihiko Toyomasu
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Table for holding workpiece and processing apparatus with the table
Patent number
10,898,987
Issue date
Jan 26, 2021
Ebara Corporation
Naoki Toyomura
B24 - GRINDING POLISHING
Information
Patent Grant
Substrate cleaning apparatus, substrate processing apparatus, and m...
Patent number
10,741,423
Issue date
Aug 11, 2020
Ebara Corporation
Hisajiro Nakano
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Substrate cleaning apparatus and substrate processing apparatus
Patent number
10,575,697
Issue date
Mar 3, 2020
Ebara Corporation
Akira Imamura
A47 - FURNITURE DOMESTIC ARTICLES OR APPLIANCES COFFEE MILLS SPICE MILLS SUCT...
Information
Patent Grant
Cleaning apparatus and substrate processing apparatus
Patent number
10,573,509
Issue date
Feb 25, 2020
Ebara Corporation
Koji Maeda
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Substrate cleaning apparatus and substrate processing apparatus
Patent number
10,546,764
Issue date
Jan 28, 2020
Ebara Corporation
Akira Imamura
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Substrate processing apparatus and substrate processing method
Patent number
10,500,691
Issue date
Dec 10, 2019
Ebara Corporation
Masayoshi Imai
B24 - GRINDING POLISHING
Information
Patent Grant
Substrate processing apparatus, substrate processing method, substr...
Patent number
10,486,285
Issue date
Nov 26, 2019
Ebara Corporation
Mitsuru Miyazaki
B24 - GRINDING POLISHING
Information
Patent Grant
Substrate processing apparatus and pipe cleaning method for substra...
Patent number
10,438,818
Issue date
Oct 8, 2019
Ebara Corporation
Junji Kunisawa
B08 - CLEANING
Information
Patent Grant
Substrate cleaning apparatus and substrate processing apparatus X
Patent number
10,361,101
Issue date
Jul 23, 2019
Ebara Corporation
Yoshitaka Kitagawa
A46 - BRUSHWARE
Information
Patent Grant
Liquid supplying device and liquid supplying method
Patent number
10,343,192
Issue date
Jul 9, 2019
Ebara Corporation
Fujihiko Toyomasu
B24 - GRINDING POLISHING
Information
Patent Grant
Cleaning chemical supplying device, cleaning chemical supplying met...
Patent number
10,340,159
Issue date
Jul 2, 2019
Ebara Corporation
Fujihiko Toyomasu
B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information
Patent Grant
Substrate cleaning apparatus and method executed in the same
Patent number
10,018,545
Issue date
Jul 10, 2018
Ebara Corporation
Teruaki Hombo
B08 - CLEANING
Information
Patent Grant
Substrate gripping apparatus
Patent number
9,892,953
Issue date
Feb 13, 2018
Ebara Corporation
Mitsuru Miyazaki
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Substrate processing apparatus, substrate processing method, substr...
Patent number
9,687,957
Issue date
Jun 27, 2017
Ebara Corporation
Mitsuru Miyazaki
B24 - GRINDING POLISHING
Information
Patent Grant
Substrate processing apparatus and processed substrate manufacturin...
Patent number
9,673,067
Issue date
Jun 6, 2017
Ebara Corporation
Toshio Yokoyama
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Substrate processing apparatus, substrate transfer method and subst...
Patent number
9,530,676
Issue date
Dec 27, 2016
Ebara Corporation
Toshio Yokoyama
B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information
Patent Grant
Substrate processing apparatus, substrate processing method, substr...
Patent number
9,358,662
Issue date
Jun 7, 2016
Ebara Corporation
Mitsuru Miyazaki
B24 - GRINDING POLISHING
Information
Patent Grant
Substrate gripping apparatus
Patent number
9,269,605
Issue date
Feb 23, 2016
Ebara Corporation
Mitsuru Miyazaki
Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information
Patent Grant
Substrate processing apparatus, substrate processing method, substr...
Patent number
8,795,032
Issue date
Aug 5, 2014
Ebara Corporation
Mitsuru Miyazaki
B24 - GRINDING POLISHING
Patents Applications
last 30 patents
Information
Patent Application
SUBSTRATE PROCESSING APPARATUS
Publication number
20240416390
Publication date
Dec 19, 2024
EBARA CORPORATION
Naoki TOYOMURA
B08 - CLEANING
Information
Patent Application
CHEMICAL SUPPLY APPARATUS, CLEANING SYSTEM, AND CHEMICAL SUPPLY METHOD
Publication number
20230249145
Publication date
Aug 10, 2023
EBARA CORPORATION
Fujihiko TOYOMASU
B08 - CLEANING
Information
Patent Application
CLEANING DEVICE, POLISHING DEVICE, AND DEVICE AND METHOD FOR CALCUL...
Publication number
20220406633
Publication date
Dec 22, 2022
EBARA CORPORATION
Michiaki MATSUDA
B08 - CLEANING
Information
Patent Application
DAMPER CONTROL SYSTEM AND DAMPER CONTROL METHOD
Publication number
20220319874
Publication date
Oct 6, 2022
EBARA CORPORATION
Akira IMAMURA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
APPARATUS FOR SUPPLYING LIQUID, CLEANING UNIT, AND APPARATUS FOR PR...
Publication number
20220187856
Publication date
Jun 16, 2022
EBARA CORPORATION
Fujihiko Toyomasu
B08 - CLEANING
Information
Patent Application
CLEANING CHEMICAL LIQUID SUPPLY DEVICE AND CLEANING CHEMICAL LIQUID...
Publication number
20220168783
Publication date
Jun 2, 2022
EBARA CORPORATION
FUJIHIKO TOYOMASU
B08 - CLEANING
Information
Patent Application
LIQUID SUPPLYING DEVICE AND METHOD FOR DRAINING LIQUID THEREOF
Publication number
20200398318
Publication date
Dec 24, 2020
EBARA CORPORATION
FUJIHIKO TOYOMASU
B08 - CLEANING
Information
Patent Application
SUBSTRATE CLEANING APPARATUS, SUBSTRATE PROCESSING APPARATUS, AND M...
Publication number
20200335363
Publication date
Oct 22, 2020
EBARA CORPORATION
Hisajiro NAKANO
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
CARRIER DEVICE, WORK PROCESSING APPARATUS, CONTROL METHOD OF CARRIE...
Publication number
20200328096
Publication date
Oct 15, 2020
EBARA CORPORATION
Yohei ETO
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING METHOD, SUBSTR...
Publication number
20200047309
Publication date
Feb 13, 2020
Mitsuru MIYAZAKI
B24 - GRINDING POLISHING
Information
Patent Application
JIG AND INSTALLATION METHOD USING SAME JIG
Publication number
20200009702
Publication date
Jan 9, 2020
EBARA CORPORATION
Lien Yin CHENG
B08 - CLEANING
Information
Patent Application
CLEANING SECTION TRANSFER ROBOT FOR TRANSFERRING SUBSTRATE, SUBSTRA...
Publication number
20190393071
Publication date
Dec 26, 2019
EBARA CORPORATION
Junji KUNISAWA
B24 - GRINDING POLISHING
Information
Patent Application
LIQUID SUPPLYING DEVICE AND LIQUID SUPPLYING METHOD
Publication number
20190270125
Publication date
Sep 5, 2019
EBARA CORPORATION
Fujihiko TOYOMASU
B08 - CLEANING
Information
Patent Application
CLEANING APPARATUS AND SUBSTRATE PROCESSING APPARATUS
Publication number
20190157118
Publication date
May 23, 2019
EBARA CORPORATION
Teruaki HOMBO
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
BUFF PROCESSING DEVICE AND SUBSTRATE PROCESSING DEVICE
Publication number
20180345452
Publication date
Dec 6, 2018
EBARA CORPORATION
Hideo AIZAWA
B24 - GRINDING POLISHING
Information
Patent Application
SUBSTRATE CLEANING APPARATUS, SUBSTRATE PROCESSING APPARATUS, AND M...
Publication number
20180337072
Publication date
Nov 22, 2018
EBARA CORPORATION
Hisajiro NAKANO
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SUBSTRATE CLEANING APPARATUS AND SUBSTRATE PROCESSING APPARATUS
Publication number
20180289230
Publication date
Oct 11, 2018
EBARA CORPORATION
Akira IMAMURA
B24 - GRINDING POLISHING
Information
Patent Application
LIQUID SUPPLYING DEVICE AND LIQUID SUPPLYING METHOD
Publication number
20180281026
Publication date
Oct 4, 2018
EBARA CORPORATION
Fujihiko TOYOMASU
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SUBSTRATE CLEANING APPARATUS AND SUBSTRATE PROCESSING APPARATUS X
Publication number
20180090347
Publication date
Mar 29, 2018
EBARA CORPORATION
Yoshitaka KITAGAWA
B08 - CLEANING
Information
Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
Publication number
20180056470
Publication date
Mar 1, 2018
EBARA CORPORATION
Masayoshi IMAI
C11 - ANIMAL AND VEGETABLE OILS, FATS, FATTY SUBSTANCES AND WAXES FATTY ACIDS...
Information
Patent Application
CLEANING APPARATUS AND SUBSTRATE PROCESSING APPARATUS
Publication number
20170372893
Publication date
Dec 28, 2017
EBARA CORPORATION
Koji Maeda
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING METHOD, SUBSTR...
Publication number
20170252894
Publication date
Sep 7, 2017
EBARA CORPORATION
Mitsuru Miyazaki
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SUBSTRATE CLEANING APPARATUS AND SUBSTRATE PROCESSING APPARATUS
Publication number
20170236730
Publication date
Aug 17, 2017
EBARA CORPORATION
Akira IMAMURA
B08 - CLEANING
Information
Patent Application
SUBSTRATE PROCESSING APPARATUS AND PIPE CLEANING METHOD FOR SUBSTRA...
Publication number
20170117165
Publication date
Apr 27, 2017
EBARA CORPORATION
Junji KUNISAWA
B08 - CLEANING
Information
Patent Application
TABLE FOR HOLDING WORKPIECE AND PROCESSING APPARATUS WITH THE TABLE
Publication number
20160346902
Publication date
Dec 1, 2016
EBARA CORPORATION
Naoki TOYOMURA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SUBSTRATE GRIPPING APPARATUS
Publication number
20160133503
Publication date
May 12, 2016
EBARA CORPORATION
Mitsuru Miyazaki
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
CLEANING CHEMICAL SUPPLYING DEVICE, CLEANING CHEMICAL SUPPLYING MET...
Publication number
20150357208
Publication date
Dec 10, 2015
EBARA CORPORATION
Fujihiko TOYOMASU
B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information
Patent Application
SUBSTRATE CLEANING APPARATUS AND METHOD EXECUTED IN THE SAME
Publication number
20150338328
Publication date
Nov 26, 2015
EBARA CORPORATION
Teruaki HOMBO
B08 - CLEANING
Information
Patent Application
SUBSTRATE PROCESSING APPARATUS, SUBSTRATE TRANSFER METHOD AND SUBST...
Publication number
20150221536
Publication date
Aug 6, 2015
EBARA CORPORATION
Toshio YOKOYAMA
B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information
Patent Application
SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING METHOD, SUBSTR...
Publication number
20150050863
Publication date
Feb 19, 2015
EBARA CORPORATION
Mitsuru MIYAZAKI
H01 - BASIC ELECTRIC ELEMENTS