Junji Miyazaki

Person

Hyogo, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Phase shift mask of attenuation type and manufacturing method thereof
- Patent number 6,048,647
- Issue date Apr 11, 2000
- Mitsubishi Denki Kabushiki Kaisha
- Junji Miyazaki
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Phase-shifting photomask blank and method of manufacturing the same...
- Patent number 5,952,128
- Issue date Sep 14, 1999
- Ulvac Coating Corporation
- Akihiko Isao
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of manufacturing phase-shifting photomask blank
- Patent number 5,938,897
- Issue date Aug 17, 1999
- Ulcoat (Ulvac Coating Corporation)
- Akihiko Isao
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Phase shift mask and manufacturing method thereof and exposure meth...
- Patent number 5,830,607
- Issue date Nov 3, 1998
- ULVAC Coating Corporation
- Akihiko Isao
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Phase shift mask and manufacturing method thereof and exposure meth...
- Patent number 5,691,090
- Issue date Nov 25, 1997
- ULVAC Coating Corporation
- Akihiko Isao
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Phase shift mask and manufacturing method thereof and exposure meth...
- Patent number 5,674,647
- Issue date Oct 7, 1997
- ULVAC Coating Corporation
- Akihiko Isao
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method of exposure employing phase shift mask of attenuation type
- Patent number 5,644,381
- Issue date Jul 1, 1997
- Mitsubishi Denki Kabushiki Kaisha
- Junji Miyazaki
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Phase shift mask and manufacturing method thereof and exposure meth...
- Patent number 5,629,114
- Issue date May 13, 1997
- ULVAC Coating Corporation
- Akihiko Isao
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method of manufacturing semiconductor device
- Patent number 5,595,938
- Issue date Jan 21, 1997
- Mitsubishi Denki Kabushiki Kaisha
- Junji Miyazaki
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Attenuating type phase shifting mask, method of manufacturing there...
- Patent number 5,593,801
- Issue date Jan 14, 1997
- Mitsubishi Denki Kabushiki Kaisha
- Nobuyuki Yoshioka
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Phase shift mask and manufacturing method thereof and exposure meth...
- Patent number 5,474,864
- Issue date Dec 12, 1995
- ULVAC Coating Corporation
- Akihiko Isao
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Phase shift mask and method for repairing a defect of a phase shift...
- Patent number 5,464,713
- Issue date Nov 7, 1995
- Mitsubishi Denki Kabushiki Kaisha
- Nobuyuki Yoshioka
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Attenuating type phase shifting mask and method of manufacturing th...
- Patent number 5,429,897
- Issue date Jul 4, 1995
- Mitsubishi Denki Kabushiki Kaisha
- Nobuyuki Yoshioka
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method of manufacturing a photomask
- Patent number 5,427,876
- Issue date Jun 27, 1995
- Mitsubishi Denki Kabushiki Kaisha
- Junji Miyazaki
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method of manufacturing a photomask comprising a phase shifter with...
- Patent number 5,415,951
- Issue date May 16, 1995
- Mitsubishi Denki Kabushiki Kaisha
- Junji Miyazaki
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Photomask and method of manufacturing the same
- Patent number 5,328,786
- Issue date Jul 12, 1994
- Mitsubishi Denki Kabushiki Kaisha
- Junji Miyazaki
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Photomask and method of manufacturing a photomask
- Patent number 5,290,647
- Issue date Mar 1, 1994
- Mitsubishi Denki Kabushiki Kaisha
- Junji Miyazaki
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method of manufacturing photomask
- Patent number 5,254,418
- Issue date Oct 19, 1993
- Mitsubishi Denki Kabushiki Kaisha
- Kazuya Kamon
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Patents Applicationslast 30 patents

Information Patent Application
Photomask unit, photomask device, projection exposure device, proje...
- Publication number 20040028269
- Publication date Feb 12, 2004
- Osamu Yamabe
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Junji Miyazaki

Person

Patents Grantslast 30 patents

Phase shift mask of attenuation type and manufacturing method thereof

Phase-shifting photomask blank and method of manufacturing the same...

Method of manufacturing phase-shifting photomask blank

Phase shift mask and manufacturing method thereof and exposure meth...

Phase shift mask and manufacturing method thereof and exposure meth...

Phase shift mask and manufacturing method thereof and exposure meth...

Method of exposure employing phase shift mask of attenuation type

Phase shift mask and manufacturing method thereof and exposure meth...

Method of manufacturing semiconductor device

Attenuating type phase shifting mask, method of manufacturing there...

Phase shift mask and manufacturing method thereof and exposure meth...

Phase shift mask and method for repairing a defect of a phase shift...

Attenuating type phase shifting mask and method of manufacturing th...

Method of manufacturing a photomask

Method of manufacturing a photomask comprising a phase shifter with...

Photomask and method of manufacturing the same

Photomask and method of manufacturing a photomask

Method of manufacturing photomask

Patents Applicationslast 30 patents

Photomask unit, photomask device, projection exposure device, proje...