Junji Nakamura

Person

Koshi-Machi, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Washing method, washing device, storage medium, and washing composi...
- Patent number 11,355,362
- Issue date Jun 7, 2022
- Tokyo Ohka Kogyo Co., Ltd.
- Isao Hirano
- C11 - ANIMAL AND VEGETABLE OILS, FATS, FATTY SUBSTANCES AND WAXES FATTY ACIDS...
Information Patent Grant
Substrate processing apparatus, substrate processing method, and st...
- Patent number 10,347,482
- Issue date Jul 9, 2019
- Tokyo Electron Limited
- Takayuki Toshima
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Surface light source device
- Patent number 8,403,550
- Issue date Mar 26, 2013
- Stanley Electric Co., Ltd.
- Junji Nakamura
- G02 - OPTICS
Information Patent Grant
Substrate support device and plasma processing apparatus
- Patent number 8,252,118
- Issue date Aug 28, 2012
- Canon Anelva Corporation
- Yohsuke Shibuya
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Rinsing method, developing method, developing system and computer-r...
- Patent number 8,147,153
- Issue date Apr 3, 2012
- Tokyo Electron Limited
- Hirofumi Takeguchi
- B08 - CLEANING
Information Patent Grant
Rinse method and developing apparatus
- Patent number 8,029,624
- Issue date Oct 4, 2011
- Tokyo Electron Limited
- Kousuke Yoshihara
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate cleaning method and developing apparatus
- Patent number 7,901,514
- Issue date Mar 8, 2011
- Tokyo Electron Limited
- Junji Nakamura
- B08 - CLEANING
Information Patent Grant
Rinsing method, developing method, developing system and computer-r...
- Patent number 7,841,787
- Issue date Nov 30, 2010
- Tokyo Electron Limited
- Hirofumi Takeguchi
- B08 - CLEANING
Information Patent Grant
Substrate cleaning method and developing apparatus
- Patent number 7,604,013
- Issue date Oct 20, 2009
- Tokyo Electron Limited
- Junji Nakamura
- B08 - CLEANING
Information Patent Grant
Hollow-beam apertures for charged-particle-beam microlithography ap...
- Patent number 6,635,891
- Issue date Oct 21, 2003
- Nikon Corporation
- Katsushi Nakano
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Brazing material for use in joining a metal plate to a ceramic subs...
- Patent number 6,399,019
- Issue date Jun 4, 2002
- Dowa Mining Co., Ltd.
- Masami Sakuraba
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Process for producing a metal-ceramic composite substrate
- Patent number 6,354,484
- Issue date Mar 12, 2002
- Dowa Mining Co., Ltd.
- Masami Sakuraba
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Metal-ceramic composite substrates, producing methods thereof and b...
- Patent number 6,221,511
- Issue date Apr 24, 2001
- Dowa Mining Co. Ltd.
- Masami Sakuraba
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Metal-ceramic composite substrate
- Patent number 6,071,592
- Issue date Jun 6, 2000
- Dowa Mining Co., Ltd.
- Masami Sakuraba
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Semiconductor substrates of high reliability ceramic metal composites
- Patent number 6,054,762
- Issue date Apr 25, 2000
- Dowa Mining Co., Ltd.
- Masami Sakuraba
- C04 - CEMENTS CONCRETE ARTIFICIAL STONE CERAMICS REFRACTORIES
Information Patent Grant
Power module circuit board and a process for the manufacture thereof
- Patent number 6,013,357
- Issue date Jan 11, 2000
- Dowa Mining Co., Ltd.
- Masami Sakuraba
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Brazing materials for producing metal-ceramics composite substrates
- Patent number 5,955,686
- Issue date Sep 21, 1999
- Dowa Mining Co., Ltd.
- Masami Sakuraba
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Molten carbonate fuel cell and method of manufacturing electrolyte...
- Patent number 4,710,436
- Issue date Dec 1, 1987
- Toppan Printing Co., Ltd.
- Junji Nakamura
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
WASHING METHOD, WASHING DEVICE, STORAGE MEDIUM, AND WASHING COMPOSI...
- Publication number 20200098593
- Publication date Mar 26, 2020
- Tokyo Ohka Kogyo Co., Ltd.
- Isao HIRANO
- C11 - ANIMAL AND VEGETABLE OILS, FATS, FATTY SUBSTANCES AND WAXES FATTY ACIDS...
Information Patent Application
SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING METHOD, AND ST...
- Publication number 20190279861
- Publication date Sep 12, 2019
- TOKYO ELECTRON LIMITED
- Takayuki Toshima
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING METHOD, AND ST...
- Publication number 20180040468
- Publication date Feb 8, 2018
- TOKYO ELECTRON LIMITED
- Takayuki Toshima
- B08 - CLEANING
Information Patent Application
SURFACE LIGHT SOURCE DEVICE
- Publication number 20110228557
- Publication date Sep 22, 2011
- JUNJI NAKAMURA
- G02 - OPTICS
Information Patent Application
RINSING METHOD, DEVELOPING METHOD, DEVELOPING SYSTEM AND COMPUTER-R...
- Publication number 20110045414
- Publication date Feb 24, 2011
- TOKYO ELECTRON LIMITED
- Hirofumi TAKEGUCHI
- B08 - CLEANING
Information Patent Application
SUBSTRATE SUPPORT DEVICE AND PLASMA PROCESSING APPARATUS
- Publication number 20090308537
- Publication date Dec 17, 2009
- Canon ANELVA Corporation
- Yohsuke Shibuya
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE CLEANING METHOD AND DEVELOPING APPARATUS
- Publication number 20090272407
- Publication date Nov 5, 2009
- TOKYO ELECTRON LIMITED
- Junji Nakamura
- B08 - CLEANING
Information Patent Application
Rinse method and developing apparatus
- Publication number 20070119479
- Publication date May 31, 2007
- TOKYO ELECTRON LIMITED
- Kousuke Yoshihara
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
RINSING METHOD, DEVELOPING METHOD, DEVELOPING SYSTEM AND COMPUTER-R...
- Publication number 20070116459
- Publication date May 24, 2007
- TOKYO ELECTRON LIMITED
- Hirofumi TAKEGUCHI
- B08 - CLEANING
Information Patent Application
Substrate cleaning method and developing apparatus
- Publication number 20060048792
- Publication date Mar 9, 2006
- TOKYO ELECTRON LIMITED
- Junji Nakamura
- B08 - CLEANING

Junji Nakamura

Person

Patents Grantslast 30 patents

Washing method, washing device, storage medium, and washing composi...

Substrate processing apparatus, substrate processing method, and st...

Surface light source device

Substrate support device and plasma processing apparatus

Rinsing method, developing method, developing system and computer-r...

Rinse method and developing apparatus

Substrate cleaning method and developing apparatus

Rinsing method, developing method, developing system and computer-r...

Substrate cleaning method and developing apparatus

Hollow-beam apertures for charged-particle-beam microlithography ap...

Brazing material for use in joining a metal plate to a ceramic subs...

Process for producing a metal-ceramic composite substrate

Metal-ceramic composite substrates, producing methods thereof and b...

Metal-ceramic composite substrate

Semiconductor substrates of high reliability ceramic metal composites

Power module circuit board and a process for the manufacture thereof

Brazing materials for producing metal-ceramics composite substrates

Molten carbonate fuel cell and method of manufacturing electrolyte...

Patents Applicationslast 30 patents

WASHING METHOD, WASHING DEVICE, STORAGE MEDIUM, AND WASHING COMPOSI...

SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING METHOD, AND ST...

SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING METHOD, AND ST...

SURFACE LIGHT SOURCE DEVICE

RINSING METHOD, DEVELOPING METHOD, DEVELOPING SYSTEM AND COMPUTER-R...

SUBSTRATE SUPPORT DEVICE AND PLASMA PROCESSING APPARATUS

SUBSTRATE CLEANING METHOD AND DEVELOPING APPARATUS

Rinse method and developing apparatus

RINSING METHOD, DEVELOPING METHOD, DEVELOPING SYSTEM AND COMPUTER-R...

Substrate cleaning method and developing apparatus