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Junji OCHI
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Tokyo, JP
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last 30 patents
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Patent Grant
Method for manufacturing SiC epitaxial wafer
Patent number
9,988,738
Issue date
Jun 5, 2018
Mitsubishi Electric Corporation
Nobuyuki Tomita
C30 - CRYSTAL GROWTH
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last 30 patents
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Patent Application
SIC EPITAXIAL WAFER PRODUCTION METHOD
Publication number
20150354090
Publication date
Dec 10, 2015
MITSUBISHI ELECTRIC CORPORATION
Nobuyuki TOMITA
C30 - CRYSTAL GROWTH