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Junji Ohe

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Patents Grantslast 30 patents

  • Information Patent Grant

    Electrostatic chuck
    • Patent number 6,643,115
    • Issue date Nov 4, 2003
    • Kyocera Corporation
    • Katsushi Sakaue
    • H02 - GENERATION CONVERSION OR DISTRIBUTION OF ELECTRIC POWER

Patents Applicationslast 30 patents

  • Information Patent Application

    Electrostatic chuck
    • Publication number 20020176219
    • Publication date Nov 28, 2002
    • Katsushi Sakaue
    • H01 - BASIC ELECTRIC ELEMENTS